Dose and energy dependence of mechanical properties of focused electron-beam-induced pillar deposits from Cu(C5HF6O 2)2

Nanotechnology

Volumn 20, Issue 38, 2009, Pages

  Friedli, V ^a   Utke, I ^a   Molhave K ^b   Michler, J ^a  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

AT RESONANCE; BEAM CURRENTS; CARBONACEOUS MATRIX; ELECTRON DOSE; ENERGY DEPENDENCE; FINITE ELEMENTS; FOCUSED ELECTRON BEAMS; FORCE SENSING; INDUCED DEPOSITION; IRRADIATION DOSE; IRRADIATION ENERGY; LOAD DEFLECTION; MATERIAL DENSITY; MATRIX; PHASE RELATION; PRIMARY ELECTRONS; PRIMARY ENERGIES; QUALITY FACTORS; RESONANCE VIBRATIONS; SCANNING ELECTRON MICROSCOPE; VIBRATION MODES; VIBRATION TEST; YOUNG'S MODULUS;

BENDING TESTS; DEPOSITS; DISSOCIATION; ELASTIC MODULI; ELASTICITY; ELECTRON ENERGY LEVELS; ELECTRONS; IRRADIATION; MECHANICAL PROPERTIES; PLANTS (BOTANY); RESONANCE; SCANNING ELECTRON MICROSCOPY;

VIBRATION ANALYSIS;

CARBON; COPPER; FLUORINE; HYDROGEN; OXYGEN;

ARTICLE; CHEMICAL COMPOSITION; DENSITY; ELECTRIC POTENTIAL; ELECTRICITY; ELECTRON; ELECTRON BEAM; ENERGY; MECHANICS; MONTE CARLO METHOD; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; YOUNG MODULUS;

EID: 70349125915     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/38/385304     Document Type: Article

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