High-purity cobalt nanostructures grown by focused-electron-beam-induced deposition at low current

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1550-1553

  Cordoba R ^a   Sese J ^a   De Teresa, J M ^a   Ibarra, M R ^a  

^a UNIVERSITY OF ZARAGOZA   (Spain)

Author keywords

Cobalt; CVD; Focused electron beam induced deposition; Nanofabrication

Indexed keywords

CO CONTENT; CO NANOSTRUCTURES; DICOBALT OCTACARBONYL; DIRECT-WRITE TECHNIQUE; ELECTRON BEAM-INDUCED DEPOSITION; FOCUSED-ELECTRON-BEAM-INDUCED DEPOSITION; HIGH-LATERAL RESOLUTION; HIGH-PURITY; LITHOGRAPHIC METHODS; LOCAL HEATING; LOW BEAM; LOW CURRENTS; MICRO HOTPLATE; NANO PATTERN; NANOFABRICATION; PRECURSOR MATERIALS; PRECURSOR MOLECULES; SUBSTRATE TEMPERATURE; THERMAL DECOMPOSITIONS; THREE-DIMENSIONAL NANOSTRUCTURES;

COBALT; ELECTRONS; HEADLIGHTS; NANOSTRUCTURES; PYROLYSIS;

CHEMICAL VAPOR DEPOSITION;

EID: 76949086299     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.11.027     Document Type: Article

References (18)

1. Randolph S.J., Fowlkes J.D., and Rack P.D. Crit. Rev. Solid State Mater. Sci. 31 (2006) 55
2. van Dorp W.F., and Hagen C.W. J. Appl. Phys. 104 (2008) 081301
3. Silvis-Cividjian N., and Hagen C.W. Advances in Imaging and Electron Physics vol. 143 (2006), Elsevier Academic Press Inc., San Diego
4. Utke I., Hoffmann P., and Melngailis J. J. Vac. Sci. Technol. B 26 (2008) 1197
5. van Kouwen L., Botman A., and Hagen C.W. Nano Lett. 9 (2009) 2149
6. Utke I., Hoffmann P., Berger R., and Scandella L. Appl. Phys. Lett. 80 (2002) 4792
7. Utke I., Bret T., Laub D., Buffat P., Scandella L., and Hoffmann P. Microelectron. Eng. 73-74 (2004) 553
8. Utke I., Michler J., Gasser P., Santschi C., Laub D., Cantoni M., Buffat P.A., Jiao C., and Hoffmann P. Adv. Eng. Mater. 7 (2005) 323
9. Boero G., Utke I., Bret T., Quack N., Todorova M., Mouaziz S., Kejik P., Brugger J., Popovic R.S., and Hoffmann P. Appl. Phys. Lett. 86 (2005) 3
10. De Teresa J.M., Córdoba R., Fernández-Pacheco A., Montero O., Strichovanec P., and Ibarra M.R. J. Nanomater. 2009 (2009) 936863
11. Botman A., Mulders J.J.L., and Hagen C.W. Nanotechnology 20 (2009) 372001
12. Fernández-Pacheco A., De Teresa J.M., Córdoba R., Ibarra M.R., Petit D., Read D.E., O'Brien L., Lewis E.R., Zeng H.T., and Cowburn R.P. Appl. Phys. Lett. 94 (2009) 192509
13. Fernández-Pacheco A., De Teresa J.M., Córdoba R., and Ibarra M.R. J. Phys. D: Appl. Phys. 42 (2009) 055005
14. Fernández-Pacheco A., De Teresa J.M., Szkudlarek A., Córdoba R., Ibarra M.R., Petit D., O'Brien L., Lewis E.R., Read D.E., Zeng H.T., and Cowburn R.P. Nanotechnology 20 (2009) 475704
15. Kunz R.R., and Mayer T.M. Appl. Phys. Lett. 50 (1987) 962
16. Ye D.X., Pimanpang S., Jezewski C., Tang F., Senkevich J.J., Wang G.C., and Lu T.M. Thin Solid Films 485 (2005) 95
17. Drouin D., Couture A.R., Joly D., Tastet X., Aimez V., and Gauvin R. Scanning 29 (2007) 92
18. Liao Z.M., Xu J., Zhang X.Z., and Yu D.P. Nanotechnology 19 (2008) 305402