Electron beam induced deposition of low resistivity platinum from Pt(PF 3) 4

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 6, 2006, Pages 3165-3168

  Barry, John D ^a   Ervin, Matthew ^b   Molstad, Jay ^b   Wickenden, Alma ^b   Brintlinger, Todd ^a,b   Hoffman, Patrik ^a,c   Meingailis, John ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b U S ARMY RESEARCH LABORATORY   (United States)

^c EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM CURRENTS; CONTACT NANOFIBERS; ELECTRON BEAM INDUCED DEPOSITION; FOCUSED ION BEAMS;

DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRON BEAMS; ELECTRON ENERGY LEVELS; ORGANOMETALLICS; SCANNING ELECTRON MICROSCOPY;

PLATINUM COMPOUNDS;

EID: 33845246163     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2395962     Document Type: Article

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