Superposition of fringelike-electron-emission pattern from radical-oxygen-gas exposed Pt field emitter fabricated by electron-beam-induced deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 2, 2009, Pages 721-724

  Murakami, K ^a   Nishihara, S ^a   Matsubara, N ^a   Ichikawa, S ^a   Wakaya, F ^a   Takai, M ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON LAYERS; ELECTRON BEAM-INDUCED DEPOSITIONS; ELECTRON WAVES; ELECTRON-BEAM; EMISSION PATTERNS; FIELD EMITTERS; FRAUNHOFER DIFFRACTIONS; OXYGEN GAS;

AMORPHOUS CARBON; ATOMS; ELECTRON EMISSION; ELECTRONS; NANOCRYSTALS; OXYGEN; PLATINUM; WAVE INTERFERENCE;

LEAKAGE (FLUID);

EID: 64549152930     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3079654     Document Type: Article

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