-
2
-
-
33646037036
-
-
van Dorp W F, Hagen C W, Crozier P A, van Someren B and Kruit P 2006 Microelectron. Eng. 83 1468
-
(2006)
Microelectron. Eng.
, vol.83
, Issue.4-9
, pp. 1468
-
-
Van Dorp, W.F.1
Hagen, C.W.2
Crozier, P.A.3
Van Someren, B.4
Kruit, P.5
-
3
-
-
0029310065
-
-
Weber M, Koops H W P, Rudolph M, Kretz J and Schmidt G 1995 J. Vac. Sci. Technol. B 13 1364
-
(1995)
J. Vac. Sci. Technol.
, vol.13
, Issue.3
, pp. 1364
-
-
Weber, M.1
Koops, H.W.P.2
Rudolph, M.3
Kretz, J.4
Schmidt, G.5
-
4
-
-
0000431442
-
-
Koops H W P, Kretz J, Rudolph M, Weber M, Dahm G and Lee K L 1994 Japan. J. Appl. Phys. 1 33 7099
-
(1994)
Japan. J. Appl. Phys.
, vol.33
, Issue.PART 1
, pp. 7099
-
-
Koops, H.W.P.1
Kretz, J.2
Rudolph, M.3
Weber, M.4
Dahm, G.5
Lee, K.L.6
-
10
-
-
0034723247
-
-
Yu M F, Lourie O, Dyer M J, Moloni K, Kelly T F and Ruoff R S 2000 Science 287 637
-
(2000)
Science
, vol.287
, Issue.5453
, pp. 637
-
-
Yu, M.F.1
Lourie, O.2
Dyer, M.J.3
Moloni, K.4
Kelly, T.F.5
Ruoff, R.S.6
-
11
-
-
22344437341
-
-
Zussman E, Chen X, Ding W, Calabri L, Dikin D A, Quintana J P and Ruoff R S 2005 Carbon 43 2175
-
(2005)
Carbon
, vol.43
, Issue.10
, pp. 2175
-
-
Zussman, E.1
Chen, X.2
Ding, W.3
Calabri, L.4
Dikin, D.A.5
Quintana, J.P.6
Ruoff, R.S.7
-
12
-
-
0142039176
-
-
Kim K S, Lim S C, Lee I B, An K H, Bae D J, Choi S, Yoo J-E and Lee Y H 2003 Rev. Sci. Instrum. 74 4021
-
(2003)
Rev. Sci. Instrum.
, vol.74
, Issue.9
, pp. 4021
-
-
Kim, K.S.1
Lim, S.C.2
Lee, I.B.3
An, K.H.4
Bae, D.J.5
Choi, S.6
Yoo, J.-E.7
Lee, Y.H.8
-
13
-
-
0141518681
-
-
Madsen D N, Molhave K, Mateiu R, Rasmussen A M, Brorson M, Jacobsen C J H and Boggild P 2003 Nano Lett. 3 47
-
(2003)
Nano Lett.
, vol.3
, Issue.1
, pp. 47
-
-
Madsen, D.N.1
Molhave, K.2
Mateiu, R.3
Rasmussen, A.M.4
Brorson, M.5
Jacobsen, C.J.H.6
Boggild, P.7
-
15
-
-
34648821370
-
-
Mitsuishi K, Noda T, Mano T, Tanaka M, Furuya K and Koguchi N 2007 19th Int. Microprocesses and Nanotechnology Conf. (Inst. Pure Applied Physics, Kanagawa) Jpn. J. Appl. Phys. 46 6277-81
-
(2007)
Jpn. J. Appl. Phys.
, vol.46
, Issue.9 B
, pp. 6277-6281
-
-
Mitsuishi, K.1
Noda, T.2
Mano, T.3
Tanaka, M.4
Furuya, K.5
Koguchi, N.6
-
18
-
-
0033692571
-
-
Ooi T, Matsumoto K, Nakao M, Otsubo M, Shirakata S, Tanaka S and Hatamura Y 2000 IEEE Proc.: Micro Electro Mechanical Systems pp580-3
-
(2000)
IEEE Proc.: Micro Electro Mechanical Systems
, pp. 580-583
-
-
Ooi, T.1
Matsumoto, K.2
Nakao, M.3
Otsubo, M.4
Shirakata, S.5
Tanaka, S.6
Hatamura, Y.7
-
23
-
-
0034314737
-
-
Matsui S, Kaito T, Fujita J, Komuro M, Kanda K and Haruyama Y 2000 J. Vac. Sci. Technol. B 18 3181
-
(2000)
J. Vac. Sci. Technol.
, vol.18
, Issue.6
, pp. 3181
-
-
Matsui, S.1
Kaito, T.2
Fujita, J.3
Komuro, M.4
Kanda, K.5
Haruyama, Y.6
-
24
-
-
0030274008
-
-
Lipp S, Frey L, Lehrer C, Demm E, Pauthner S and Ryssel H 1996 Microelectron. Reliab. 36 1779
-
(1996)
Microelectron. Reliab.
, vol.36
, Issue.11-12
, pp. 1779
-
-
Lipp, S.1
Frey, L.2
Lehrer, C.3
Demm, E.4
Pauthner, S.5
Ryssel, H.6
-
25
-
-
0942289203
-
-
Fujita J, Ishida M, Ichihashi T, Ochiai Y, Kaito T and Matsui S 2003 J. Vac. Sci. Technol. B 21 2990
-
(2003)
J. Vac. Sci. Technol.
, vol.21
, Issue.6
, pp. 2990
-
-
Fujita, J.1
Ishida, M.2
Ichihashi, T.3
Ochiai, Y.4
Kaito, T.5
Matsui, S.6
-
34
-
-
33745647869
-
-
Mitsuishi K, Shimojo M, Takeguchi M, Tanaka M and Furuya K 2006 Japan. J. Appl. Phys. 1 45 5517
-
(2006)
Japan. J. Appl. Phys.
, vol.45
, Issue.6 B
, pp. 5517
-
-
Mitsuishi, K.1
Shimojo, M.2
Takeguchi, M.3
Tanaka, M.4
Furuya, K.5
-
38
-
-
26444485983
-
-
Liang S, Yajima A, Abe S, Mera Y and Maeda K 2005 Surf. Sci. 593 161
-
(2005)
Surf. Sci.
, vol.593
, Issue.1-3
, pp. 161
-
-
Liang, S.1
Yajima, A.2
Abe, S.3
Mera, Y.4
Maeda, K.5
-
43
-
-
1942536985
-
-
Cicoira F, Leifer K, Hoffmann P, Utke I, Dwir B, Laub D, Buffat P A, Kapon E and Doppelt P 2004 J. Cryst. Growth 265 619
-
(2004)
J. Cryst. Growth
, vol.265
, Issue.3-4
, pp. 619
-
-
Cicoira, F.1
Leifer, K.2
Hoffmann, P.3
Utke, I.4
Dwir, B.5
Laub, D.6
Buffat, P.A.7
Kapon, E.8
Doppelt, P.9
-
44
-
-
11844266514
-
-
Cicoira F, Hoffmann P, Olsson C O A, Xanthopoulos N, Mathieu H J and Doppelt P 2005 Appl. Surf. Sci. 242 107
-
(2005)
Appl. Surf. Sci.
, vol.242
, Issue.1-2
, pp. 107
-
-
Cicoira, F.1
Hoffmann, P.2
Olsson, C.O.A.3
Xanthopoulos, N.4
Mathieu, H.J.5
Doppelt, P.6
-
46
-
-
0344256630
-
-
Molhave K, Madsen D N, Rasmussen A M, Carlsson A, Appel C C, Brorson M, Jacobsen C J H and Boggild P 2003 Nano Lett. 3 1499
-
(2003)
Nano Lett.
, vol.3
, Issue.11
, pp. 1499
-
-
Molhave, K.1
Madsen, D.N.2
Rasmussen, A.M.3
Carlsson, A.4
Appel, C.C.5
Brorson, M.6
Jacobsen, C.J.H.7
Boggild, P.8
|