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Volumn 22, Issue 26-27, 2010, Pages 2919-2938

Crystalline oxides on silicon

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER; CRYSTALLINE OXIDES; DEPOSITION TECHNIQUE; FIRST-PRINCIPLES THEORY; MATERIALS SYSTEMS; MULTIFUNCTIONAL COMPLEX; POTENTIAL APPLICATIONS; REAL-SPACE; SCIENCE AND TECHNOLOGY; SEMICONDUCTOR TECHNOLOGY; SILICON INTERFACE; STRUCTURAL CHARACTERIZATION;

EID: 77955362092     PISSN: 09359648     EISSN: 15214095     Source Type: Journal    
DOI: 10.1002/adma.200904306     Document Type: Review
Times cited : (215)

References (145)
  • 8
    • 77955381474 scopus 로고
    • US Patent 2,791,758
    • D. H. Looney, US Patent 2,791,758, 1957.
    • (1957)
    • Looney, D.H.1
  • 9
    • 77955375609 scopus 로고
    • US Patent 2,791,759.
    • W. L Brown, US Patent 2,791,759,1957.
    • (1957)
    • Brown, W.L.1
  • 10
    • 77955354022 scopus 로고
    • US Patent 2,791,761
    • J. A. Morton, US Patent 2,791,761, 1957.
    • (1957)
    • Morton, J.A.1
  • 11
    • 77955348630 scopus 로고
    • US Patent 2,791,760
    • I. M. Ross, US Patent 2,791,760, 1957.
    • (1957)
    • Ross, I.M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.