Epitaxial growth of yittria-stabilized zirconia oxide thin film on natively oxidized silicon wafer without an amorphous layer

Semiconductor Science and Technology

Volumn 15, Issue 8, 2000, Pages 836-839

  Wang, S J ^a   Ong, C K ^a   You, L P ^a   Xu, S Y ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CRYSTALLINE MATERIALS; DEPOSITION; EPITAXIAL GROWTH; INTERFACES (MATERIALS); PARTIAL PRESSURE; PRESSURE EFFECTS; PULSED LASER APPLICATIONS; SILICON WAFERS; THIN FILMS; YTTRIUM COMPOUNDS; ZIRCONIA;

PULSED LASER DEPOSITION;

SEMICONDUCTING FILMS;

EID: 0034247599     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/15/8/309     Document Type: Article

References (18)

1. Packan P A 1999 Science 285 2079
2. McKee R A, Walker F J and Chisholm M F 1998 Phys. Rev. Lett. 81 3014
3. Feldman L C, Gusev E P and Garfunkel E 1998 Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices ed E Garfunkel et al (Dordrecht: Kluwer)
4. Eisenbeiser K et al 2000 Appl. Phys. Lett. 76 1324
5. Inoue T, Ohsuna T, Obara Y, Yamamoto Y, Sato M and Sakurai Y 1993 Japan. J. Appl. Phys. 32 1765
6. Bardal A, Mattee Th, Wecker J and Samwer K 1994 J. Appl. Phys. 75 2902
7. Fork D K, Fenner D B, Connell GAN, Phillips J M and Geballe T H 1990 Appl. Phys. Lett. 57 1137
8. Horita S, Abe Y and Kawada T 1996 Thin Solid Films 281-282 28
9. Copel M, Gribelyyuk M and Gusev E 2000 Appl. Phys. Lett. 76 436
10. Choi S C, Cho M H, Whangho S W, Whang C N. Kang S B, Lee S I and Lee M Y 1997 Appl. Phys. Lett. 71 903
11. Fork D K, Ponce F A, Tramontana J C and Balle T H 1991 Appl. Phys. Lett. 58 2294
12. Kado Y and Arita Y 1987 J. Appl. Phys. 61 2398
13. Ngai T, Qi W J, Sharma R, Fretwell J, Chen X, Lee J C and Banerjee S 2000 Appl. Phys. Lett. 76 502
14. Low B L, Xu S Y, Ong C K, Wang X B and Shen Z X 1996 Supercond. Sci. Technol. 10 41
15. Ong C K, Rao X S and Jin BB 1999 Supercond. Sci. Technol. 12 827
16. Wang S J, Xu S Y, You L P, Lim S L and Ong C K 2000 Supercond. Sci. Technol. 13 362
17. Rubloff G W, Hofmann K, Lier M and Young D R 1987 Phys. Rev. Lett. 58 2379
18. Samsonov G V (ed) 1982 The Oxide Handbook (LFI Plenum Data) 2nd edn (New York: Plenum)