Two-dimensional growth of high-quality strontium titanate thin films on Si

Journal of Applied Physics

Volumn 93, Issue 8, 2003, Pages 4521-4525

  Li, H ^a   Hu, X ^a   Wei, Y ^a   Yu, Z ^a   Zhang, X ^a   Droopad, R ^a   Demkov, A A ^a   Edwards Jr , J ^a   Moore, K ^a   Ooms, W ^a   Kulik, J ^a   Fejes, P ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; FILM GROWTH; OXIDATION; SILICON; STRONTIUM COMPOUNDS;

GROWTH PROCESS;

THIN FILMS;

EID: 0038341908     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1562001     Document Type: Article

References (19)

1. H. Ishiwara, Integr. Ferroelectr. 17, 11 (1997).
2. D. L. Polla and L. F. Francis, Mater. Res. Bull. 21, 59 (1996).
3. O. Auciello, J. F. Scott, and R. Ramesh, Phys. Today 51, 22 (1998).
4. Z. Yu, J. A. Ramdani, J. A. Curless, C. D. Overgaard, J. M. Finder, R. Droopad, K. W. Eisenbeiser, J. A. Hallmark, J. W. Ooms, and V. S. Kaushik, J. Vac. Sci. Technol. B 18, 2139 (2000).
5. R. McKee, F. Walker, and M. Chisholm, Proceedings of the Ultrathin SiO/sub 2/ and High-k Materials for ULSI Gate Dielectrics Symposium 1999, pp. 415-425.
6. K. J. Hubbard and D. G. Schlom, J. Mater. Res. 11, 2757 (1996).
7. R. A. McKee, F. J. Walker, and M. F. Chisholm, Phys. Rev. Lett. 81, 3014 (1998).
8. J. Lettieri, J. H. Haeni, and D. G. Schlom, J. Vac. Sci. Technol. A 20, 1332 (2002).
9. E. G. Keim, L. Wolterbeek, and A. van Silfhout, Surf. Sci. 180, 565 (1987).
10. T. Tambo, T. Nakamura, K. Maeda, H. Ubba, and C. Tatsuyama, Jpn. J. Appl. Phys., Part 1 37, 4454 (1998).
11. T. Tambo, K. Maeda, A. Shimizu, and C. Tatsuyama, J. Appl. Phys. 86, 3213 (1999).
12. J. Goniakowski and C. Noguera, Surf. Sci. 319, 68 (1994).
13. Z. Yu, J. Ramdani, J. A. Curless, J. M. Finder, C. D. Overgaard, R. Droopad, K. W. Eisenbeiser, J. A. Hallmark, W. J. Ooms, J. R. Conner, and V. S. Kaushik, J. Vac. Sci. Technol. B 18, 1653 (2000).
14. Y. Wei, X. Hu, Y. Liang, D. C. Jordan, B. Craigo, R. Droopad, Z. Yu, A. Demkov, J. John, L. Edwards, and W. J. Ooms, J. Vac. Sci. Technol. B 20, 1402 (2002).
15. R. A. McKee, F. J. Walker, and M. F. Chisholm, Science 293, 468 (2001).
16. M. A. Berding, S. Krishnamurthy, and A. Sher, Appl. Phys. Lett. 67, 6175 (1990).
17. A. A. Demkov, Phys. Status Solidi B 226, 57 (2001).
18. X. Zhang and A. Demkov (unpublished).
19. J. Ramdani, R. Droopad, Z. Yu, J. A. Curless, C. D. Overgaard, J. Finder, K. Eisenbeiser, J. A. Hallmark, W. J. Ooms, V. Kaushik, P. Alluri, and S. Pietambaram, Appl. Surf. Sci. 159, 127 (2000).