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Volumn 78, Issue 14, 2001, Pages 2034-2036

Epitaxial growth of Pb(Zr0.2Ti0.8)O3 on Si and its nanoscale piezoelectric properties

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0035794335     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1358848     Document Type: Article
Times cited : (79)

References (20)
  • 2
    • 20744442768 scopus 로고
    • S. C. Minne, S. R. Manalis, and C. F. Quate, Appl. Phys. Lett. 67, 3918 (1995); T. Itoh and T. Suga, The Proceedigs of Transducers, '95 (Royal Swedish Academy of Engineering Science, IVA, Stockholm, Sweden, 1995), p. 632; T. Fujii, S. Watanabe, M. Suzuki, and T. Fujiu, J. Vac. Sci. Technol. B 13, 1119 (1995).
    • (1995) Appl. Phys. Lett. , vol.67 , pp. 3918
    • Minne, S.C.1    Manalis, S.R.2    Quate, C.F.3
  • 3
    • 20744442768 scopus 로고
    • Royal Swedish Academy of Engineering Science, IVA, Stockholm, Sweden
    • S. C. Minne, S. R. Manalis, and C. F. Quate, Appl. Phys. Lett. 67, 3918 (1995); T. Itoh and T. Suga, The Proceedigs of Transducers, '95 (Royal Swedish Academy of Engineering Science, IVA, Stockholm, Sweden, 1995), p. 632; T. Fujii, S. Watanabe, M. Suzuki, and T. Fujiu, J. Vac. Sci. Technol. B 13, 1119 (1995).
    • (1995) The Proceedigs of Transducers, '95 , pp. 632
    • Itoh, T.1    Suga, T.2
  • 4
    • 1842698276 scopus 로고
    • S. C. Minne, S. R. Manalis, and C. F. Quate, Appl. Phys. Lett. 67, 3918 (1995); T. Itoh and T. Suga, The Proceedigs of Transducers, '95 (Royal Swedish Academy of Engineering Science, IVA, Stockholm, Sweden, 1995), p. 632; T. Fujii, S. Watanabe, M. Suzuki, and T. Fujiu, J. Vac. Sci. Technol. B 13, 1119 (1995).
    • (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 1119
    • Fujii, T.1    Watanabe, S.2    Suzuki, M.3    Fujiu, T.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.