Epitaxial growth of SrO on Si(001): Chemical and thermal stability

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 6, 2007, Pages 1505-1511

  El Kazzi, M ^a   Delhaye, G ^a   Merckling, C ^a,b   Bergignat, E ^a   Robach, Y ^a   Grenet, G ^a   Hollinger, G ^a  

^a UNIVERSITÉ DE LYON   (France)

^b STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; FILM GROWTH; HIGH ENERGY ELECTRON DIFFRACTION; PLASTIC DEFORMATION; THERMODYNAMIC STABILITY; X RAY PHOTOELECTRON SPECTROSCOPY;

CRYSTALLINE QUALITY; CRYSTALLINE SILICATES; HIGH-K OXIDES;

STRONTIUM COMPOUNDS;

EID: 36048948025     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2784720     Document Type: Article

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