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Volumn 13, Issue 1-4, 2001, Pages 135-143

Theoretical investigation of ultrathin gate dielectrics

(3) Demkov, Alexander A a Zhang, Xiaodong a Loechelt, Heather a

a MOTOROLA INC (United States)

Author keywords

Electronic structure; Gate dielectrics; Oxynitrides; Quantum transport

Indexed keywords

DIELECTRIC MATERIALS; ELECTRONIC STRUCTURE; LOGIC GATES; QUANTUM THEORY; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES;

ULTRATHIN GATE DIELECTRICS;

MOS DEVICES;

EID: 0035695721 PISSN: 1065514X EISSN: None Source Type: Journal
DOI: 10.1155/2001/98032 Document Type: Article

Times cited : (4)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.