Microchip technology in mass spectrometry

Mass Spectrometry Reviews

Volumn 29, Issue 3, 2010, Pages 351-391

  Sikanen, Tiina ^a   Franssila, Sami ^b   Kauppila, Tiina J ^a   Kostiainen, Risto ^a   Kotiaho, Tapio ^a   Ketola, Raimo A ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

^b AALTO UNIVERSITY   (Finland)

Author keywords

Atmospheric pressure ionization; Mass analyzer; Mass spectrometry; Microchip technology; Microfabrication; Microfluidics

Indexed keywords

ATMOSPHERIC PRESSURE IONIZATION; MASS ANALYZER; MASS ANALYZERS; MICROCHIP TECHNOLOGIES; MICROCHIP TECHNOLOGY;

ANALYTIC EQUIPMENT; ATMOSPHERIC CHEMISTRY; ATMOSPHERIC PRESSURE; ATMOSPHERICS; ION SOURCES; IONIZATION; IONS; MASS SPECTROMETRY; MICROANALYSIS; MICROFABRICATION; MICROFLUIDICS; MICROMACHINING; MICROPROCESSOR CHIPS; MINIATURE INSTRUMENTS; PARTICLE DETECTORS;

ATMOSPHERIC IONIZATION;

GLASS; POLYMER; SILICON;

ARTICLE; ELECTROSPRAY MASS SPECTROMETRY; INSTRUMENTATION; MASS SPECTROMETRY; MICROCOMPUTER; NANOTECHNOLOGY;

GLASS; MASS SPECTROMETRY; MICROCOMPUTERS; NANOTECHNOLOGY; POLYMERS; SILICON; SPECTROMETRY, MASS, ELECTROSPRAY IONIZATION; SPECTROMETRY, MASS, MATRIX-ASSISTED LASER DESORPTION-IONIZATION;

EID: 77952853696     PISSN: 02777037     EISSN: 10982787     Source Type: Journal    
DOI: 10.1002/mas.20238     Document Type: Article

References (276)

1. Abgrall P, Gue AM. 2007. Lab-on-chip technologies: Making a microfluidic network and coupling it into a complete microsystem-A review. J Micromech Microeng 17:R15-R49. (Pubitemid 46656167)
2. Aderogba S, Meacham JM, Degertekin FL, Fedorov AG, Fernandez FM. 2005. Nanoelectrospray ion generation for high-through-put mass spectrometry using a micromachined ultrasonic ejector array. Appl Phys Lett 86:203110-203113.
3. Akashi T, Yoshimura Y. 2006. Deep reactive ion etching of borosilicate glass using an anodically bonded silicon wafer as an etch mask. J Micromech Microeng 16:1051.-1056. (Pubitemid 43797630)
4. Akashi S, Suzuki K, Arai A, Yamada N, Suzuki EI, Hirayama K, Nakamura S, Nishimura Y. 2006. Top-down analysis of basic proteins by microchip capillary electrophoresis mass spectrometry. Rapid Commun Mass Spectrom 20:1932-1938. (Pubitemid 43893348)
5. Alexandrov ML, Gall LN, Krasnov NV, Nikolaev VI, Pavlenko VA, Shkurov VA. 1984. Ion extraction from, solutions at atmospheric-pressure-A method of mass-spectrometric analysis of hioorganic substances. Dokl. Akad Nauk SSSR 277:379-383.
6. Alimpiev S, Grechnikov A, Sunner J, Karavanskii V, Simanovsky Y, Zhabin S, Nikiforov S. 2008. On the role of defects and surface chemistry for surface-assisted laser desorption ionization from silicon. J Chem Phys 128:014711-1-014711-14719
7. Anglin EJ, Cheng L, Freeman WR, Sailor MJ. 2008. Porous silicon in drug delivery devices and materials. Adv Drug Deliv Rev 60:1266-1277.
8. Arscott S, Le Gac S, Druon C, Tabourier P, Rolando C. 2004a. A planar onchip micro-nib interface for NanoESI-MS microfluidic applications. J Micromech Microeng 14:310-316.
9. Arscott S, Le Gac S, Druon C, Tabourier P, Rolando C. 2004b. A micro-nib nanoelectrospray source for mass spectrometry. Sens Actuators B 98:140-147.
10. Arscott S, Le Gac S, Rolando C. 2005. A polysilicon nanoelectrospray-mass spectrometry source based on a microfluidic capillary slot. Sens Actuators B 106:741-749. (Pubitemid 40557635)
11. Austin DE, Wang M, Tolley SE, Maas JD, Hawkins AR, Rockwood AL, Tolley HD, Lee ED, Lee ML. 2007. Halo ion trap mass spectrometer. Anal Chem 79:2927-2932. (Pubitemid 46595647)
12. Badman ER, Cooks RG. 2000. Miniature mass analyzers. J Mass Spectrom 35:659-671.
13. Becker H, Gärtner C. 2008. Polymer microfabrication technologies for microfluidic systems. Anal Bioanal Chem 390:89-111.
14. Bedair MF, Oleschuk RD. 2006. Fabrication of porous polymer monoliths in polymeric microfluidic chips as an electrospray emitter for direct coupling to mass spectrometry. Anal Chem 78:1130-1138.
15. Belloy B, Sayah. A, Gijs MAM. 2000. Powder blasting for three-dimensional microstructuring of glass. Sens Actuators A 86:231.-237.
16. Belov ME, Gorshkov MV, Udseth HR, Anderson GA, Smith RD. 2000. Zeptomole-sensitivity electrospray ionization-fourier transform ion cyclotron resonance mass spectrometry of proteins. Anal Chem 72: 2271-2279. (Pubitemid 30322291)
17. Benetton S, Kameoka J, Tan A, Wachs T, Craighead H, Henion JD. 2003. Chip-based P450 drug metabolism coupled to electrospray ionizationmass spectrometry detection. Anal Chem 75:6430-6436. (Pubitemid 37493897)
18. Berthold A, Nicola L, Sarro PM, Vellekoop MJ. 2000. Glass-to-glass anodic bonding with standard IC technology thin films as intermediate layers. Sens Actuators A 82:224-228.
19. Bhattacharya S, Dutta A, Berg JM, Gangopadhyay S. 2005. Studies on surface wettability of poly(dimethyl)siloxane (PDMS) and glass under oxygenplasna treatment and correlation with bond strength. J Microelectromech Syst 14:590-597. (Pubitemid 41005078)
20. Bilenberg A, Nielsen T, Clausen B, Kristensen A. 2004. PMMA to SU-8 bonding for polymer based lab-on-a-chip systems with integrated optics. J Micromech Microeng 14:814-818.
21. Bings NH, Wang C, Skinner CD, Colyer CL, Thibault P, Harrison DJ. 1999. Microfluidic devices connected to fused-silica capillaries with minimal dead volume. Anal Chem 71:3292-3296. (Pubitemid 29372752)
22. Birkinshaw K, Langstaff DP. 1996. The ideal detector. Rapid Commun Mass Spectrom .10:1675-1677.
23. Björkman H, Ericsson C, Hjerten S, Hjort K. 2001. Diamond microchips for fast chromatography of proteins. Sens Actuators B 79:71-77. (Pubitemid 32746183)
24. Blain MG, Riter LS, Cruz D, Austin DE, Wu G, Plass WR, Cooks RG. 2004. Towards the hand-held mass spectrometer: Design considerations, simulation, and fabrication of micrometer-scaled cylindrical ion traps. Int J Mass Spectrom 236:91-104.
25. Bogdanski N, Schulz H, Wissen M, Scheer HC, Zajadacz J, Zimmer K. 2004. 3D hot embossing of undercut structures-An approach to microzippers. Microelectron Eng 73-74:190-195.
26. Brenner N, Sikanen T, Aura S, Tuomikoski S, Vuorensola K, Kotiaho T, Franssila S, Kostiainen R. 2008. Rapid separation of protein digests on SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microchips. Proc MicroTAS (12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, San Diego, CA) 2:1141-1143.
27. Briand D, Heimgartner S, Gretillat MA, van der Schoot B, de Rooij NF. 2002. Thermal optimization of micro-hotplates that have a silicon island. J Micromech Microeng 12:971-978. (Pubitemid 35369267)
28. Brivio M, Liesener A, Oosterbroek RE, Verboom W, Karst U, van den Berg A, Reinhoudt DN. 2005a. Chip-based on-line nanospray ms method enabling study of the kinetics of isocyanate derivatization reactions. Anal Chem 77:6852-6856. (Pubitemid 41547278)
29. Brivio M, Oosterbroek RE, Verboom W, van den Berg A, Reinhoudt DN. 2005b. Simple chip-based interfaces for on-line monitoring of supramolecular interactions by nano-ESI MS. Lab Chip 5:1111-1122. (Pubitemid 41453002)
30. Bühler J, Steiner FP, Baltes H. 1997. Silicon dioxide sacrificial layer etching in surface micromachining. J Micromech Microeng 7:R1-R13. (Pubitemid 127627435)
31. Carlier J, Arscott S, Thomy V, Camart JC, Cren-Olivé C, Le Gac S. 2005. Integrated microfabricated systems including a purification module and an on-chip nano electrospray ionization interface for biological analysis. J Chromotogr A. 1071:213-222. (Pubitemid 40461780)
32. Chan JH, Timperman AT, Qin D, Aebersold R. 1999. Microfabricated polymer devices for automated sample delivery of peptides for analysis by electrospray ionization tandem mass spectrometry. Anal Chem 71:4437-4444. (Pubitemid 129563188)
33. Chang YZ, Yang MW, Wang GJ. 2005. A new mass spectrometry electrospray tip obtained via precise mechanical micromachining. Anal Bioanal Chem 383:76-82.
34. Chaudhary A, van Amerom FHW, Short RT, Bhansali S. 2006. Fabrication and testing of a miniature cylindrical ion trap mass spectrometer constructed from low temperature co-fired ceramics. Int J Mass Spectrom 251:32-39.
35. Chen KS, Ayon AA, Zhang X, Spearing SM, 2002. Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE). J MEMS 11:264-275. (Pubitemid 34784511)
36. Chen HJH, Chen TF, Huang SRS, Gong J, Lia JC, Chen WC, Hseu TH, Hsu IC. 2003. A novel micro-well array chip for liquid phase biomaterial processing and detection. Sens Actuators A 108:193-200.
37. Chen Z, Gao Y, Lin J, Su R, Xie Y. 2004. Vacuum-assisted thermal bonding of plastic capillary electrophoresis microchip imprinted with steel template. J Chromatogr A 1038:239-245. (Pubitemid 38624371)
38. Chen LY, Velásquez-García LF, Wang X, Teo K, Akinwande AI. 2007. A micro ionizer for portable mass spectrometers using double-gated isolated vertically aligned carbon nanofiber arrays. Proc IEDM Tech. Dig (IEEE International Electron Devices Meeting, Washington DC), Vol. 2, pp. 843-846.
39. Cheung K, Velásquez-García LF, Akinwande AI. 2008. Fully batchfabricated linear quadrupole mass filters. Poster in Hilton Head Workshop 2008: A Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head Island, SC.
40. Chiem N, Lockyear-Shultz L, Andersson P, Skinner C, Harrison DJ. 2000. Room temperature bonding of micromachined glass devices for capillary electrophoresis. Sens Actuators B 63:147-152.
41. Chiou CH, Lee GB, Hsu HT, Chen PW, Liao PC. 2002. Micro device integrated with microchannels and electrospray nozzles using PDMS casting techniques. Sens Actuators B 86:280-286.
42. Chou SY, Krauss PR, Zhang W, Guo L, Zhuang L. 1997. Sub-10 nm imprint lithography and applications. J Vac Sci Technol B 15:2897-2904.
43. Christiansen SH, Singh R, Gosele U. 2006. Wafer direct bonding: From advanced substrate engineering to future applications in micro/nanoelectronics. Proc IEEE 92-94:2060-2106. (Pubitemid 46445559)
44. Cruz D, Chang JP, Blain MG. 2005. Field emission characteristics of a tungsten microelectromechanical system device. Appl Phys Lett 86: 153502-1-153502-153503
45. Dahlin AP, Wetterhall M, Liljegren G, Bergstrom SK, Andren P, Nyholm L, Markides KE, Bergquist J. 2005a. Capillary electrophoresis coupled to mass spectrometry from, a polymer modified poly(dimethylsiloxane) microchip with an integrated graphite electrospray tip. Analyst 130: 193-199. (Pubitemid 40278415)
46. Dahlin AP, Bergström SK, Andren PE, Markides KE, Bergquist J. 2005b. Poly(dimethylsiloxane)-based microchip for two-dimensional solidphase extraction-capillary electrophoresis with an integrated electrospray emitter tip. Anal. Chem. 77:5356-5363.
47. Daridon A, Faseio V, Lichtenberg J, Wütrich R, Langen H, Verpoorte E, de Rooij NF. 2001. Multi-layer microfluidic glass chips for microanalytical applications. Fresenius J Anal Chem. 371:261-269. (Pubitemid 33752102)
48. Darling RB, Scheidemann AA, Bhat KN, Chen TC. 2002. Micromachined Faraday cup array using deep reactive ion etching. Sens Actuators A 95:84-93.
49. Dayon L, Abonnenc M, Prudent M, Lion N, Girault HH. 2006. Multitrack electrospray chips. J Mass Spectrom. 41:1484-1490.
50. de Malsche W, Clicq D, Verdoold V, Gzil P, Desmet G, Gardeniers H. 2007. Integration of porous layers in ordered pillar arrays for liquid chromatography. Lab Chip 7:1705-1711. (Pubitemid 350145534)
51. de Mello AJ. 2001. Chip-MS: Coupling the large with the small. Lab Chip 1:7N-12N.
52. del Campo A, Greiner C. 2007. SU-8: A photoresist for high aspect ratio and 3D submicron lithography. J Micromech Microeng 17:R81-R95.
53. Deng Y, Henion J, Li J, Thibault P, Wang C, Harrison DJ. 2001. Chip-based capillary electrophoresis/mass spectrometry determination of carnitines in human urine. Anal. Chem 73:639-646. (Pubitemid 32116458)
54. Deng Y, Zhang H, Henion J. 2001. Chip-based quantitative capillary electrophoresis/mass spectrometry determination of drugs in human plasma. Anal Chem 73:1432-1439. (Pubitemid 32896197)
55. Deng W, Klemic JF, Li X, Reed MA, Gomez A. 2006. Increase of electrospray throughput using multiplexed microfabricated sources for the scalable generation of monodisperse droplets. Aerosol Sci 37:696-714.
56. Desai A, Tai YC, Davis MT, Lee TD. 1997. A MEMS electrospray nozzle for mass spectrometry. Proc Transducers '97 (Chicago, IL), pp. 927-930.
57. Despont M, Gross H, Arrouy F, Stebler C, Staufer U. 1996. Fabrication of silicon-Pyrex-silicon stack by a.c. anodic bonding. Sens Actuators A 55:219-224. (Pubitemid 126372757)
58. Dethy JM, Ackermann BL, Delatour C, Henion JD, Schultz GA. 2003. Demonstration of direct bioanalysis of drugs in plasma using nanoelectrospray infusion from a silicon chip coupled with tandem mass spectrometry. Anal Chem 75:805-811. (Pubitemid 36232433)
59. DeVoe DL, Lee CS. 2006. Microfluidic technlogies for MALDI-MS in proteomics. Electrophoresis 27:3559-3568.
60. Diaz JA, Giese CF, Gentry WR. 2001. Sub-miniature ExB sector-field mass spectrometer. J Am Soc Mass Spectrom 12:619-632.
61. Dole M, Mack LL, Hines RL. 1968. Molecular beams of macroions. J Chem Phys 49:2240-2249.
62. Doms M, Müller J. 2005. A micromachined vapor jet pump. Sens Actuators A 119:462-467.
63. Doms M, Muller J. 2007. Design, fabrication, and characterization of a micro vapor-jet vacuum, pump. J Fluids Eng 129:1339-1345. (Pubitemid 350070858)
64. Doms M, Bekesch A, Müller J. 2005. A microfabricated Pirani pressure sensor operating near atmospheric pressure. J Micromech Microeng 15:1504-1510. (Pubitemid 41023524)
65. Easley CJ, Humphrey JAC, Landers JP. 2007. Thermal isolation of microchip reaction chambers for rapid non-contact DNA amplification. J Micromech Microeng 17:1758-1766.
66. Ek P, Sjödahl J, Roeraade J. 2006. Electrospray ionization from a gap with adjustable width. Rapid Commun Mass Spectrom 20:3176-3182. (Pubitemid 44626778)
67. Ekström S, Nilsson J, Marko-Varga G, Laurell T. 2008. Microfluidic sample preparation for proteomics and analysis using MALDI-MS. In: Landers JP, editor. Handbook of capillary and microchip electrophoresis and associated microtechniques. Boca Raton: CRC Press, pp. 1341-1373.
68. Felter TE. 1999. Cold cathode field emitter array on a quadrupole mass spectrometer: Route to miniaturization. J Vac Sci Technol B 17:1993-1996.
69. Fenn JB, Mann M, Meng CK, Wong SF, Whitehouse CM. 1989. Electrospray ionization for mass spectrometry of large biomolecules. Science 246:64-71. (Pubitemid 19252085)
70. Figeys D, Gygi SP, McKinnon G, Aebersold R. 1998. An integrated microfluidics-tandem mass spectrometry system for automated protein analysis. Anal Chem 70:3728-3734. (Pubitemid 128484698)
71. Fiqeys D, Pinto D. 2001. Proteomics on a chip: Promising developments. Electrophoresis 22:208-216.
72. Foret F, Kusý P. 2006. Microfluidics for multiplexed MS analysis. Electrophoresis 27:4877-4887.
73. Fortier MH, Bonneil E, Goodley P, Thibault P. 2005. Integrated microfluidic device for mass spectrometry-based proteomics and its application to biomarker discovery programs. Anal Chem 77:1631-1640. (Pubitemid 40396255)
74. Franssila S. 2004. Introduction to microfabrication. Chichester: John Wiley & Sons. p. 410.
75. Franssila S, Sainiemi L. 2008. RIE. In: Li D, editor. Encyclopedia of micro and nanofluidics. US: Springer. ISBN 978-0-387-32468-5 (Print), 978-0-387-48998-49008 (Online).
76. Franssila S, Tuomikoski S. 2009. MEMS lithography. In: Lindroos V, editor. Handbook of silicon-based MEMS technologies. Elsevier (in press).
77. Franssila S, Marttila S, Kolari K, Ostman P, Kotiaho T, Kostiainen R, Lehtiniemi R, Fager CM, Manninen J. 2006. A microfabricated nebulizer for liquid vaporization in chemical, analysis. J Microelectromech Syst 15:1251-1259. (Pubitemid 44566944)
78. Freidhoff CB. 2007. MEMS mass spectrometer. US Pat Appl Publ US 2007096023.
79. Freidhoff CB, Young RM, Sriram S, Braggins TT, O'Keefe TW, Adam JD, Nathanson HC, Syms RRA, Tate TJ, Ahmad MM, Taylor S, Tunstall J. 1999. Chemical sensing using nonoptical microelectromechanical systems. J Vac Sci Technol A 17:2300-2307.
80. Freire SL, Wheeler AR. 2006. Proteome-on-a-chip: Mirage, or on the horizon? Lab Chip 6:1415-1423.
81. Freire SLS, Yang H, Wheeler AR. 2008. A practical, interface for microfluidics and nanoelectrospray mass spectrometry. Electrophoresis 29:1836-1843. (Pubitemid 351663879)
82. Geear M, Syms RRA, Wright S, Holmes AS. 2005. Monolithic MEMS quadrupole mass spectrometers by deep silicon etching. J Microelectromech Syst 14:1156-1166. (Pubitemid 41555305)
83. Getty SA, King TT, Bis RA, Jones HH, Herrero F, Lynch BA, Roman P, Mahaffy P. 2007. Performance of a carbon nanotube field emission electron gun. Proc SPIE 6556:655618. (Pubitemid 350069284)
84. Getty SA, Bis RA, Snyder S, Gehrels E, Ramirez K, King TT, Roman PA, Mahaffy PR. 2008. Effect of nitrogen gas on the lifetime of carbon nanotube field emitters for electron-impact ionization mass spectrometry. Proc SPIE 6959:695907. (Pubitemid 351746802)
85. Gobry V, van Oostrum J, Martinelli M, Rohner TC, Reymond F, Rossier JS, Girault HH. 2002. Microfabricated polymer injector for direct mass spectrometry coupling. Proteomics 2:405-412. (Pubitemid 34429358)
86. Guber AE, Heckele M, Herrmann D, Muslija A, Saile V, Eichhorn L, Gietzelt T, Hoffmann W, Hauser PC, Tanyanyiwa J, Gerlach A, Gottschlich N, Knebel. G. 2004. Microfluidic lab-on-a-chip systems based on polymers - fabrication and applications. Chem Eng J 101:447-453. (Pubitemid 38688790)
87. Guo U. 2007. Nanoimprint lithography: Methods and material requirements. Adv Mater 19:495-513.
88. Haapala M, Luosujarvi L, Saarela V, Kotiaho T, Ketola RA, Franssila S, Kostiainen R. 2007a. Microchip for combining gas chromatography or capillary liquid chromatography with atmospheric pressure photoionization-mass spectrometry. Anal Chem 79:4994-4999. (Pubitemid 47051454)
89. Haapala M, Pol J, Saarela V, Arvola V, Kotiaho T, Ketola RA, Franssila S, Kauppila TJ, Kostiainen R. 2007b. Desorption atmospheric pressure photoionization. Anal Chem 79:7867-7872.
90. Haapala M, Purcell JM, Saarela V, Franssila S, Rodgers RP, Hendrickson CL, Kotiaho T, Marshall AG, Kostiainen R. 2009. Microchip atmospheric pressure photoionization for analysis of petroleum, by Fourier transform ion cyclotron mass spectrometry. Anal Chem 81:2799-2883.
91. Haubert K, Drier T, Beebe D. 2006. PDMS bonding by means of a portable, low-cost corona system. Lab Chip 6:1548-1549. (Pubitemid 46100751)
92. Hauschild JP, Wapelhorst E, Müller J, Doms M. 2005. A fully integrated plasma electron source for micro mass spectrometers. Proc MicroTAS (9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, Boston, MA, October 2005), Vol, 1: pp. 476-478.
93. Hauschild JP, Wapelhorst E, Müller J. 2007. Mass spectra measured by a fully integrated MEMS mass spectrometer. Int J Mass Spectrom 264:53-60.
94. He B, Tait N, Regnier F. 1998. Fabrication of nanocolumns for liquid chromatography. Anal Chem 70:3790-3797.
95. Hessel V, Löwe H, SchönfeldF. 2004. Micromixers-A review of passive and active mixing principles. Chem. Eng Sci 60:2479-2501.
96. Hoffmann P, Häusig U, Schulze P, Beider D. 2007. Microfluidic glass chips with an integrated nanospray emitter for coupling to a mass spectrometer. Angew Chem. Int Ed 46:4913-4916. (Pubitemid 47055957)
97. Huikko K, Kostiainen R, Kotiaho T. 2003. Introduction to micro-analytical systems: Bioanalytical and pharmaceutical applications. Eur J Pharm. Sci 20:149-171. (Pubitemid 37205209)
98. Huikko K, Östman P, Grigoras K, Tuomikoski S, Tiainen VM, Soininen A, Puolanne K, Manz A, Franssila S, Kostiainen R, Kotiaho T. 2003. Poly(dimethylsiloxane) electrospray devices fabricated with diamondlike carbon-poly(dimethylsiloxane) coated SU-8 masters. Lab Chip 3:67-72. (Pubitemid 41646562)
99. Hülsenberg D, Harnisch A, Bismarck A. 2008. Microstructuring of glasses. Springer. Berlin, Heidelberg, New York: p. 323.
100. Iannacone JM, Jakubowski JA, Bohn PW, Sweedler JV. 2005. A multilayer poly(dimethylsiloxane) electrospray ionization emitter for sample injection and online mass spectrometric detection. Electrophoresis 26:4684-4690.
101. Iliescu C, Jing J, Tay FEH, Miao J, Sun T. 2005. Characterization of masking layers for deep etching of glass in an improved HF/HC1 solution. Surface Coatings Technol 198:314-318. (Pubitemid 40854702)
102. Jackman R, Floyd T, Ghodssi R, Schmidt M, Jensen K. 2001. Microfluidic systems with on-line UV detection fabricated in photodefinable epoxy. J Micromech Microeng 11:263-269. (Pubitemid 32471816)
103. Jensen K, Kim K, Zett A. 2008. An atomic-resolution nanomechanical mass sensor. Nature Nanotechn 3:533-537.
104. Jia ZJ, Fang Q, Fang ZL. 2004. Bonding of glass microfluidic chips at room temperatures. Anal Chem 76:5597-5602. (Pubitemid 39249450)
105. Jo K, Heien ML, Thompson LB, Zhong M, Nuzzo RG, Sweedler JV. 2007. Mass spectrometry imaging of peptide release from neuronal cells within microfluidic devices. Lab Chip 7:1454-1460. (Pubitemid 350013184)
106. Kajiyama T, Miyahara Y, Kricka LJ, Wilding P, Graves DJ, Surrey S, Fortina P. 2003. Genotyping on a thermal gradient DNA chip. Genome Res 13:467-475. (Pubitemid 36395404)
107. Kameoka J, Craighead HG, Zhang H, Henion J. 2001. A polymeric microfluidic chip for CE/MS determination of small molecules. Anal Chem 73:1935-1941. (Pubitemid 32862397)
108. Kameoka J, Orth R, Ilic B, Czaplewski D, Wachs T, Craighead HG. 2002. An electrospray ionization source for integration with microfluidics. Anal Chem 74:5897-5901. (Pubitemid 35364849)
109. Kauppila TJ, Kuuranne T, Meurer EC, Eberlin MN, Kotiaho T, Kostiainen R. 2002. Atmospheric pressure photoionization mass spectrometry. Ionization mechanism and the effect of solvent on the ionization of naphthalenes. Anal Chem 74:5470-5479.
110. Kauppila TJ, Ostman P, Marttila S, Ketola RA, Kotiaho T, Franssila S, Kostiainen R. 2004a. Atmospheric pressure photoionization-mass spectrometry with a microchip heated nebulizer. Anal Chem 76:6797-6801. (Pubitemid 39507273)
111. Kauppila TJ, Kotiaho T, Kostiainen R, Bruins AP. 2004b. Negative ionatmospheric pressure photoionization-mass spectrometry. J Am Soc Mass Spectrom 15:203-211. (Pubitemid 38183209)
112. Kauppila TJ, Arvola V, Haapala M, Pol J, Aalberg L, Saarela V, Franssila S, Kotiaho T, Kostiainen R. 2008. Direct analysis of illicit drugs by desorption atmospheric pressure photoionization. Rapid Commun Mass Spectrom 22:979-985. (Pubitemid 351468252)
113. Kelly R, Pan T, Woolley A. 2005. Phase-changing sacrificial materials for solvent bonding of high-performance polymeric capillary electrophoresis microchips. Anal Chem 77:3536-3541. (Pubitemid 40799843)
114. Keski-Rahkonen P, Haapala M, Saarela V, Franssila S, Kotiaho T, Kostiainen R, Auriola S. 2008. Microchip heated nebulizer as a no-discharge atmospheric pressure chemical ionization source for mass spectrometry. Proc MSB (22nd International Symposium on Microscale Bioseparations & Methods for Systems Biology, Berlin, Germany), p. 424.
115. Kiihamäki J, Franssila S. 1999. Pattern shape effects and artefacts in deep silicon etching. J Vac Sci Technol A 17:2280-2285.
116. Kiihamäki J, Kattelus H, Karttunen J, Franssila S. 2000. Depth and profile control in plasma etched mems structures. Sens Actuators A 82:234-238.
117. Kim JS, Knapp DR. 2001a. Microfabrication of polydimethylsiloxane electrospray ionization emitters. J Chromatogr A 924:137-145.
118. Kim JS, Knapp DR. 2001b. Miniaturized multichannel electrospray ionization emitters on poly(dimethylsiloxane) microfluidic devices. Electrophoresis 22:3993-3999.
119. Kim H, Najafi K. 2005. Characterization of low-temperature wafer bonding using thin film parylene. J Microelectromech Syst 14:1347-1355. (Pubitemid 41830208)
120. Kim MS, Cho SI, Lee KN, Kim YK. 2005. Fabrication of microchip electrophoresis devices and effects of channel surface properties on separation efficiency. Sens Actuators B 107:818-824. (Pubitemid 40655024)
121. Kim W, Guo M, Yang P, Wang D. 2007. Microfabricated monolithic multinozzle emitters for nanoelectrospray mass spectrometry. Anal Chem 79:3703-3707. (Pubitemid 46799066)
122. King TT, Getty SA, Roman PA, Herrero FA, Jones HH, Kahle DM, Lynch B, Suárez G, Brinckerhoff WB, Mahaffy PR. 2008. Simulation of a miniature, low-power time-of-flight mass spectrometer for in situ analysis of planetary atmospheres. Proc SPIE 6959:69590E.
123. Kolari K. 2008. Deep plasma etching of glass with a silicon shadow mask. Sens Actuators A. 141:677-66684.
124. Kolari K, Saarela V, Franssila S. 2008. Deep plasmaetching of glass for fluidic devices with different mask materials. J Micromech Microeng 18: 064010-1-064010-64016
125. Kornienko O, Reilly PTA, Whitten WB, Ramsey JM. 1999. Micro ion trap mass spectrometry. Rapid Commun Mass Spectrom 13:50-53. (Pubitemid 29032734)
126. Kornienko O, Reilly PTA, Whitten WB, Ramsey JM. 2000. Field-emission cold-cathode EI source for a microscale ion trap mass spectrometer. Anal Chem 72:559-562. (Pubitemid 33595292)
127. Koster S, Verpoorte E. 2007. A decade of microfluidic analysis coupled with electrospray mass spectrometry: An overview. Lab Chip 7:1394-1412. (Pubitemid 350013203)
128. Laser DJ, Santiago JG. 2004. A review of micropumps. J Micromech Microeng 14:R35-R64.
129. Laurell T, Nilsson J, Marko-Varga G. 2001. Silicon microstructures for highspeed and high-sensitivity protein identifications. J Chromatogr B 752:217-232. (Pubitemid 32168158)
130. Lazar IM. 2008. Microfluidic devices with mass spectrometry detection. In: Landers JP, editor. Handbook of capillary and microchip electrophoresis and associated microtechniques. Boca Raton: CRC Press, pp. 1459-1505.
131. Lazar IM, Ramsey RS, Sundberg S, Ramsey JM, 1999. Subattomolesensitivity microchip nanoelectrospray source with time-of-flight mass spectrometry detection. Anal Chem 71:3627-3631. (Pubitemid 129525447)
132. Lazar IM, Li L, Yang Y, Karger BL. 2003. Microfluidic device for capillary electrochromatography-mass spectrometry. Electrophoresis 24:3655-3662. (Pubitemid 38089168)
133. Lazar IM, Grym J, Foret F. 2006. Microfabricated devices: A new sample introduction approach to mass spectrometry. Mass Spectrom Rev 25:573-594. (Pubitemid 44014104)
134. Lazar IM, Trisiripisal P, Sarvaiya HA. 2006. Microfluidic liquid chromatography system for proteomic applications and biomarker screening. Anal Chem 78:5513-5524. (Pubitemid 44182372)
135. Le Gac S, Arscott S, Rolando C. 2003. A planar microfabricated nanoelectrospray emitter tip based on a capillary slot. Electrophoresis 24:3640-3647. (Pubitemid 38089166)
136. Le Gac S, Carlier J, Camart JC, Cren-Olivé C, Rolando C. 2004. Monoliths for microfluidic devices in proteomics. J Chromotogr B 808:3-14.
137. Le Gac S, Rolando C, Arscott S. 2006. An open design microfabricated niblike nanoelectrospray emitter tip on a conducting silicon substrate for the application of the ionization voltage. J Am Soc Mass Spectrom 17:75-80. (Pubitemid 43031391)
138. Lee TMH, Lee DHY, Liaw CYN, Lao AIK, Hsing IM. 2000. Detailed characterization of anodic bonding process between glass and thin-film coated silicon substrates. Sens Actuators A 86:103-1.07.
139. Legrand B, Ashcroft AE, Buchaillot L, Arscott S. 2007. SOI-based nanoelectrospray emitter tips for mass spectrometry: A coupled MEMS and microfluidic design. J Micromech Microeng 17:509-514. (Pubitemid 46778463)
140. Lehmann V. 1996. Porous silicon - A new material for mems. Proc MEMS '96 (IEEE, The Ninth Annual International Workshop on Micro Electro Mechanical Systems), pp. 1-6.
141. Lerou PPP, ter Brake HJM, Burger JF, Holland HJ, Rogalla H. 2007. Characterization of micromachined cryogenic coolers. J Micromech Microeng 17:1956-1960.
142. Li JJ, Thibault P, Bings NH, Skinner CD, Wang C, Colyer C, Harrison J. 1999. Integration of microfabricated devices to capillary electrophoresiselectrospray mass spectrometry using a low dead volume connection: Application to rapid analyses of proteolytic digests. Anal Chem 71:3036-3045. (Pubitemid 29372716)
143. Li J, Kelly JF, Chernushevich I, Harrison DJ, Thibault P. 2000a. Separation and identification of peptides from gel-isolated membrane proteins using a microfabricated device for combined capillary electrophoresis/ nanoelectrospray mass spectrometry. Anal Chem 72:599-609. (Pubitemid 33595298)
144. Li J, Wang C, Kelly JF, Harrison DJ, Thibault P. 2000b. Rapid and sensitive separation of trace levele protein digests using microfabricated devices coupled to a quadrupole-time-of-flight mass spectrometer. Electrophoresis 21:198-210. (Pubitemid 30032714)
145. Li X, Abe T, Esashi M. 2001. Deep reactive ion etching of Pyrex glass using SF6 plasma. Sens Actuators A 87:139-145. (Pubitemid 32131575)
146. Li S, Freidhoff CB, Young RM, Ghodssi R. 2003. Fabrication of micronozzles using low-temperature wafer-bonding with SU-8. J Micromech Microeng 13:732-738.
147. Li FA, Wang CH, Her OR. 2007. A sheathless poly(methyl methacrylate) chip-CE/MS interface fabricated using a wire-assisted epoxy-fixing method. Electrophoresis 28:1265-1273.
148. Li HF, Liu J, Cai Z, Lin JM. 2008. Coupling a microchip with electrospray ionization quadrupole time-of-flight mass spectrometer for peptide separation and identification. Electrophoresis 29:1889-1894. (Pubitemid 351663886)
149. Lichtenberg J, de Rooij N, Veipoorte E. 2002. Sample pretreatment on microfabricated devices. Talanta 56:233-266.
150. Licklider L, Wang XQ, Desai A, Tai YC, Lee TD. 2000. A micromachined chip-based electrospray source for mass spectrometry. Anal Chem 72:367-375. (Pubitemid 30051895)
151. Limbach PA, Meng Z. 2002. Integrating micromachined devices with modern mass spectrometry. Analyst 127:693-700. (Pubitemid 34628201)
152. Lin L, Pisano A. 1999. Silicon-processed microneedles. J Microelectromech Syst 8:78-84.
153. Lin CH, Lee GB, Chang BW, Chang GL. 2002. A new fabrication process for ultra-thick microfluidic microstructures utilizing SU-8 photoresist. J Micromech Microeng 12:590-597.
154. Lion N, Gobry V, Jensen H, Rossier JS, Girault H. 2002. Integration of a membrane-based desalting step in a microfabricated disposable polymer injector for mass spectrometric protein analysis. Electrophoresis 23:3583-3588. (Pubitemid 35363903)
155. Lion N, Rohner TC, Dayon L, Arnaud IL, Damoc E, Youhnovski N, Wu ZY, Roussel C, Josserand J, Jensen H, Rossier JS, Przybylski M, Girault HH. 2003a. Microfluidic systems in proteomics. Electrophoresis 24:3533-3562.
156. Lion N, Gellon JO, Jensen H, Girault HH. 2003b. On-chip protein sample desalting and preparation for direct coupling with electrospray ionization mass spectrometry. J Chromatogr A 1003:11-19. (Pubitemid 36829246)
157. Liu H, Felten C, Xue Q, Zhang B, Jedrzejewski P, Karger BL, Foret F. 2000. Development of multichannel devices with an array of electrospray tips for high-throughput mass spectrometry. Anal Chem 72:3303-3310. (Pubitemid 30482508)
158. Liu J, Tseng K, Garcia B, Lebrilla CB, Mukerjee E, Collins S, Smith R, 2001. Electrophoresis separation in open microchannels. A method for coupling electrophoresis with MALDI-MS. Anal Chem 73:2147-2151.
159. Liu J, Ro KW, Nayak R, Knapp DR. 2007. Monolithic column plastic microfluidic device for peptide analysis using electrospray from a channel opening on the edge of the device. Int J Mass Spectrom 259:65-72.
160. Luosujärvi L, Karikko MM, Haapala M, Saarela V, Huhtala S, Franssila S, Kostiainen R, Kotiaho T, Kauppila TJ. 2008a. Gas chromatography/mass spectrometry of polychlorinated biphenyls using atmospheric pressure chemical ionization and atmospheric pressure photoionization microchips. Rapid Commun Mass Spectrom 22:425-431. (Pubitemid 351300574)
161. Luosujärvi L, Arvola V, Haapala M, Pól J, Saarela V, Franssila S, Kotiaho T, Kostiainen R, Kauppila TJ. 2008b. Desorption and ionization mechanisms in desorption atmospheric pressure photoionization. Anal Chem. 80:7460-7466.
162. Madsen MJ, Hensinger WK, Stick D, Rabchuk JA, Monroe C. 2004. Planar ion trap geometry for microfabrication. Appl Phys B: Lasers 78:639-651.
163. Mao X, Chu IK, Lin B. 2006. A sheath-flow nanoelectrospray interface of microchip electrophoresis MS for glycoprotein and glycopeptide analysis. Electrophoresis 27:5059-5067. (Pubitemid 46040718)
164. Mellors JS, Gorbounov V, Ramsey RS, Ramsey JM. 2008. Fully integrated glass microfluidic device for performing high-efficiency capillary electrophoresis and electrospray ionization mass spectrometry. Anal. Chem 80:6881-6887.
165. Meng Z, Qi S, Soper SA, Limbach PA. 2001. Interfacing a polymer-based micromachined device to a nanoelectrospray ionization Fourier transform ion cyclotron resonance mass spectrometer. Anal Chem 73:1286-1291. (Pubitemid 32861917)
166. Meng C, Aoyagi S, Tai. YC. 2004. High aspect ratio parylene etching for microfluidics and Bio mems. Proc MicroTAS (8th International Conference on Miniaturized Systems for Chemistry and Life Sciences, Malmö, Sweden), Vol. 2: pp. 401-403.
167. Mery E, Ricoul F, Sarrut N, Constantin O, Delapierre G, Garin J, Vinet F. 2008. A. silicon microfluidic chip integrating an ordered micropillar array separation column and a nano-electrospray emitter for LC/MS analysis of peptides. Sens Actuators B 134:438-446.
168. Mills C, Martinez E, Bessueille F, Villaneuva G, Bausells J, Samiter J, Errachid A. 2005. Production of structures for microfluidics using polymer imprint techniques. Microelectron Eng 78-79:695-700. (Pubitemid 40371038)
169. Mok MLS, Hua L, Phua JBC, Wee MKT, Sze NSK. 2004. Capillary isoelectric focussing in pseudo-closed channel to matrix assisted laser desorption/ ionization mass spectrometry for protein analysis. Analyst 129:109-110. (Pubitemid 38250687)
170. Mouton R, Semet V, Kilgour D, Brookes MD, Binh VT. 2008. Polymer embedded C nanopearls field emission cathodes for time of flight mass spectrometers. J Vac Sci Technol B 26:755-759. (Pubitemid 351474192)
171. Muck A, Svatos A. 2004. Atmospheric molded poly(methylmethacrylate) microchip emitters for sheathless electrospray. Rapid Commun Mass Spectrom 18:1459-1464. (Pubitemid 38868746)
172. Narasimhan J, Papautsky I. 2004. Polymer embossing tools for rapid prototyping of plastic microfluidic devices. J Micromech Microeng 14:96-103.
173. Niklaus F, Enoksson P, Kälvesten E, Stemme G. 2001a. Low-temperature full wafer adhesive bonding. J Micromech Microeng 11:100-107. (Pubitemid 32266023)
174. Niklaus F, Enoksson P, Kälvesten E, Stemme G. 2001b. Low-temperature full wafer adhesive bonding of structured wafers. Sens Actuators A 92:235-241. (Pubitemid 32697902)
175. Niklaus F, Stemme G, Lu JQ, Gutmann RJ. 2006. Adhesive wafer bonding. J Appl Phys 99: 031101-1-031101-31128
176. Nilsson S, Svedberg M, Pettersson J, Björefors F, Markides K, Nyholm L. 2001. Evaluations of the stability of sheathless electrospray ionization mass spectrometry emitters using electrochemical techniques. Anal Chem 73:4607-4616. (Pubitemid 32953184)
177. Nilsson S, Klett O, Svedberg M, Amirkhani A, Nyholm L. 2003. Gold-coated fused-silica sheathless electrospary emitters based on vapor-deposited titanium adhesion layers. Rapid Commun Mass Spectrom 17:1535-1540. (Pubitemid 36841333)
178. NissiläT, Sainiemi L, Sikanen T, Kotiaho T, Franssila S, Kostiainen S, Ketola RA. 2007. Silicon micropillar array electrospray chip for drug and biomolecule analysis. Rapid Commun Mass Spectrom 21:3677-3682. (Pubitemid 350124637)
179. Northen TR, Yanes O, Northen MT, Marrinucci D, Uritboonthai W, Apon J, Golledge SL, Nordström A, Siuzdak G. 2007. Clathrate nanostructure for mass spectrometry. Nature 449:1033-1036.
180. Oberhammer J, Niklaus F, Stemme G. 2003. Selective wafer-level adhesive bonding with benzocyclobutene for fabrication of cavities. Sens Actuators A 105:297-304.
181. Oh KW, Ahn CH. 2006. A review of microvalves. J Micromech Microeng 16:R13-R39.
182. Oh KW, Han A, Bhansali S, Ahn CH. 2002. A low-temperature bonding technique using spin-on fluorocarbon polymers to assemble Microsystems. J Micromech Microeng 12:187-191. (Pubitemid 34247428)
183. Oleschuk R, Harrison J. 2000. Analytical Microdevices for mass spectrometry. Trends Anal Chem 19:379-388.
184. Östman P. 2007. Microchip atmospheric pressure ionization-mass spectrometry (academic dissertation). Helsinki: Helsinki University Printing House, p. 70.
185. Östman P, Marttila SJ, Kotiaho T, Franssila S, Kostiainen R. 2004. Microchip atmospheric pressure chemical ionization source for mass spectrometry. Anal Chem 76:6659-6664. (Pubitemid 39507257)
186. Östman P, Jantti S, Grigoras K, Saarela V, Ketola RA, Franssila S, Kotiaho T, Kostiainen R. 2006. Capillary liquid chromatography-microchip atmospheric pressure chemical ionization-mass spectrometry. Lab Chip 6:948-953. (Pubitemid 43962803)
187. Östman P, Luosujarvi L, Haapala M, Grigoras K, Ketola RA, Kotiaho T, Franssila S, Kostiainen R. 2006. Gas chromatography-microchip atmospheric pressure chemical ionization-mass spectrometry. Anal Chem 78:3027-3031. (Pubitemid 43726121)
188. Ouyang Z, Gao L, Fico M, Chappell WJ, Noll RJ, Cooks RG. 2007. Quadrupole ion traps and trap arrays: Geometry, material, scale, performance. Eur J Mass Spectrom 13:13-18.
189. Pan CT, Yang H, Shen SC, Chou MC, Chou HP. 2002. A low-temperature wafer bonding using patternable materials. J Micromech Microeng 12:611-615.
190. Pau S, Pai CS, Low YL, Moxom J, Reilly PTA, Whitten WB, Ramsey JM. 2006. Microfabricated quadrupole ion trap for mass spectrometer applications. Phys Rev Lett 96:120801-120804.
191. Peterson DS. 2007. Matrix-free methods for laser desorption/ionization mass spectrometry. Mass Spectrom Rev 26:19-34. (Pubitemid 46051811)
192. Petzold G, Siebert P, Müller J. 2000. A micromachined electron beam ion source. Sens Actuators B 67:101-111.
193. Pol J, Kauppila TJ, Haapala M, Saarela V, Franssila S, Ketola RA, Kotiaho T, Kostiainen R. 2007. Microchip sonic spray ionization. Anal Chem 79:3519-3523.
194. Prudent M, Rossier JS, Lion N, Girault HH. 2008. Microfabricated dual sprayer for on-line mass tagging of phosphopeptides. Anal Chem 80:2531-2538. (Pubitemid 351499837)
195. Ramsey RS, Ramsey JM. 1997. Generating electrospray from microchip devices using electroosmotic pumping. Anal Chem 69:1174-1178. (Pubitemid 127491139)
196. Razunguzwa TT, Lenke J, Timperman AT. 2005. An electrokinetic/ hydrodynamic flow microfluidic CE-ESI-MS interface utilizing a hydrodynamic flow restrictor for delivery of samples under low EOF conditions. Lab Chip 5:851-855. (Pubitemid 41117312)
197. Reed H, White C, Rao V, Bidstrup Allen S, Henderson C, Kohl P. 2001. Fabrication of microchannels using polycarbonates as sacrificial materials. J Micromech Microeng 11:733-737. (Pubitemid 33084910)
198. Robb DB, Covey TR, Bruins AP. 2000. Atmospheric pressure photoionization: An ionization method for liquid chromatography-mass spectrometry. Anal Chem 72:3653-3659. (Pubitemid 30614945)
199. Rohner TC, Rossier JS, Girault HH. 2001. Polymer microspray with an integrated thick-film microelectrode. Anal Chem 73:5353-5357.
200. Roman PA, Brinckerhoff WB, Getty SA, Herrero FA, Hu R, Jones HH, Kahle D, King TT, Mahaffy P. 2008. A miniature mems and nems enabled time-of-flight mass spectrometer for investigations in planetary science. Proc SPIE 6959:69590G.
201. Saarela V, Haapala M, Kostiainen R, Kotiaho T, Franssila S. 2007. Glass microfabricated nebulizer chip for mass spectrometry. Lab Chip 7:644-66646. (Pubitemid 46699214)
202. Sainiemi L, Keskinen H, Aromaa M, Luosujärvi L, Grigoras K, Kotiaho T, Mäkelä J, Franssila S. 2007. Rapid fabrication of high aspect ratio silicon nanopillars for chemical analysis. Nanotechnology 18:505303-1-505303- 505307
203. Sainiemi L, Nissilä T, Jokinen V, Sikanen T, Kotiaho T, Kostiainen R, Ketola RA, Franssila S. 2008. Fabrication and characterization of silicon micropillar array electrospray ionization chip. Sens Actuators B 132:380-387.
204. Schilling M, Nigge W, Rudzinski A, Neyer A, Hergenroder R. 2004. A new on-chip ESI nozzle for coupling of MS with microfluidic devices. Lab Chip 4:220-224. (Pubitemid 38937589)
205. Schmidt MA. 1998. Wafer-to-wafer bonding for microstructure formation. Proc IEEE 86:1575-1585.
206. Schultz GA, Corso TN, Prosser SJ, Zhang S. 2000. A fully integrated monolithic microchip electrospray device for mass spectrometry. Anal Chem 72:4058-4063.
207. Shinohara H, Suzuki T, Kitagawa F, Mizunoa J, Otsuka K, Shoji S. 2008. Polymer microchip integrated with nano-electrospray tip for electrophoresis-mass spectrometry. Sens Actuators B 132:368-373.
208. Shiu PP, Knopf GK, Ostojic M, Nikumb S. 2008. Rapid fabrication of tooling for microfluidic devices via laser machining and hot embossing. J Micromech Microeng 18:025012-1-025012-25018
209. Sia SK, Whitesides GM, 2003. Microfluidic devices fabricated in poly(dimethylsiloxane) for biological studies. Electrophoresis 24: 3563-3576. (Pubitemid 38089159)
210. Siebert P, Petzold G, Hellenbart A, Müller J. 1998. Surface microstructure/miniature mass spectrometer: Processing and application. Appl Phys A 67:155-160. (Pubitemid 128662911)
211. Sikanen T, Tuomikoski S, Ketola RA, Kostiainen R, Franssila S, Kotiaho T. 2005. Characterization of SU-8 for electrokinetic microfluidic applications. Lab Chip 5:888-896. (Pubitemid 41117317)
212. Sikanen T, Tuomikoski S, Ketola RA, Kostiainen R, Franssila S, Kotiaho T. 2007. Fully microfabricated and integrated SU-8-based capillary electrophoresis-electrospray ionization microchips for mass spectrometry. Anal Chem 79:9135-9144. (Pubitemid 350231726)
213. Sikanen T, Tuomikoski S, Ketola RA, Kostiainen R, Franssila S, Kotiaho T. 2008. Analytical characterization of microfabricated SU-8 emitters for electrospray ionization mass spectrometry. J Mass Spectrom 43:726-735. (Pubitemid 351954807)
214. Sillon N, Baptist R. 2002. Micromachined mass spectrometer. Sens Actuators B 83:129-137.
215. Sjödahl J, Melin J, Griss P, Emmer A, Stemme J, Roeraade J. 2003. Characterization of micromachined hollow tips for two-dimensional nanoelectrospray mass spectrometry. Rapid Commun Mass Spectrom 17:337-341. (Pubitemid 36193673)
216. Stick D, Hensinger WK, Olmschenik S, Madsen MJ, Schwab K, Monroe C. 2006. Ion trap in a semiconductor chip. Nature Chem 2:36-39.
217. Stieglitz T, Beutel H, Schuettler M, Meyer JU. 2000. Micromachined, polyimide-based devices for flexible neural interfaces. Biomed Microdev 2:283-294.
218. Su J, Bringer MR, Ismagilov RF, Mrksich M. 2005. Combining microfluidic networks and peptide arrays for multi-enzyme assays. J Am Chem. Soc 127:7280-7281. (Pubitemid 40745992)
219. Sung WC, Huang SY, Liao PC, Lee GB, Li CW, Chen SH. 2003. Poly(dimethylsiloxane)-based microfluidic device with electrospray ionization-mass spectrometry interface for protein identification. Electrophoresis 24:3648-3654.
220. Sung WC, Makamba H, Chen SH. 2005. Chip-based microfluidic devices coupled with electrospray ionization-mass spectrometry. Electrophoresis 26:1783-1791. (Pubitemid 40691495)
221. Suni T, Henttinen K, Lipsanen A, Dekker J, Luoto H, Kulawski M. 2006. Wafer-scale packaging of mems by using plasma-activated wafer bonding. J Electrochem Soc 153:G78-G82.
222. Suni NM, Haapala M, Mäkinen A, Sainiemi L, Franssila S, Färm E, Puukilainen E, Ritala M, Kostiainen R. 2008. Selective surface patterning with an electric discharge in the fabrication of microfluidic structures. Angew Chem Int Ed 47:7442-7445.
223. Sunner J, Dratz E, Chen Y-C. 1995. Graphite surface-assisted laser desorption/ionization time-of-flight mass spectrometry of peptides and proteins from liquid solutions. Anal Chem 67: 4335-4342.
224. Svedberg M, Pettersson A, Nilsson S, Bergquist J, Nyholm L, Nikolajeff F, Markides K. 2003. Sheathless electrospray from polymer microchips. Anal Chem 75: 3934-3940.
225. Svedberg M, Veszelei M, Axelsson J, Vangbo M, Nikolajeff F. 2004. Poly(dimethylsiloxane) microchip: Microchannel with integrated open electrospray tip. Lab Chip 4: 322-327. (Pubitemid 39150232)
226. Syage JA. 2004. Mechanism of [M + H]+ formation in photoionization mass spectrometry. J Am Soc Mass Spectrom 15: 1521-1533. (Pubitemid 39433846)
227. Syms RRA. 2009. Advances in microfabricated mass spectrometers. Anal Bioanal Chem 393: 427-429.
228. Syms RRA, Tate TJ, Ahmad MM, Taylor S. 1996. Fabrication of a microengineered quadrupole electrostatic lens. IEE Electron Lett 32: 2094-2095. (Pubitemid 126599283)
229. Syms RRA, Tate TJ, Ahmad MM, Taylor S. 1998. Design of a microengineered quadrupole electrostatic lens. IEEE Trans Electron Dev TED45: 2304-2311. (Pubitemid 128739971)
230. Syms RRA, Michelutti L, Ahmad MM. 2003. Two-dimensional microfabricated electrostatic einzel lens. Sens Actuators A 107: 285-295.
231. Tachibana Y, Otsuka K, Terabe S, Arai A, Suzuki K, Nakamura S. 2003. Robust and simple interface for microchip electrophoresis-mass spectrometry. J Chromatogr A 1011: 181-192. (Pubitemid 36993674)
232. Tang K, Lin Y, Matson DW, Kim T, Smith RD. 2001. Generation of multiple electrospray s using microfabricated emitter arrays for improved mass spectrometric sensitivity. Anal Chem 73: 1658-1663. (Pubitemid 32862428)
233. Taylor S, Tunstall JJ, Leek JH, Tindall RF, Jullien JP, Batey J, Syms RRA, Tate T, Ahmad MM. 1999. Performance improvements for a miniature quadrupole with a micromachined mass filter. Vacuum 53: 203-206.
234. Thorslund S, Lindberg P, Andren PE, Nikolajeff F, Bergquist J. 2005. Electrokinetic-driven microfludic system in poly(dimethylsiloxane) for mass spectrometry detection integrating sample injection, capillary electrophoresis, and electrospray emitter on-chip. Electrophoresis 26: 4674-4683. (Pubitemid 43020153)
235. Tiggelaar RM, Benito-López F, Hermes DC, Rathgen H, Egberink RJM, Mugele FG, Reinhoudt DN, van den Berg A, Verboom W, Gardeniers HJGE. 2007. Fabrication, mechanical testing and application of highpressure glass microreactor chips. Chem Eng J 131: 163-170. (Pubitemid 46734751)
236. Tuomikoski S, Franssila S. 2005. Free-standing SU-8 microfluidic chips by adhesive bonding and release etching. Sens Actuators A 120: 408-415. (Pubitemid 40567835)
237. Tuomikoski S, Sikanen T, Ketola RA, Kostiainen R, Kotiaho T, Franssila S. 2005. Fabrication of enclosed SU-8 tips for electrospray ionization mass spectrometry. Electrophoresis 26: 4691-4702. (Pubitemid 43020155)
238. Tuomikoski S, Sikanen T, Ketola RA, Kostiainen R, Kotiaho T, Franssila S. 2007. Monolithically integrated electrophoresis microchip with electrospray ionization mass spectrometric detection. The Proceedings of μTAS Conference 2007, Paris, France, pp. 835-837.
239. Van Amerom FHW, Chaudhary A, Cardenas M, Bumgarner J, Short RT. 2008. Microfabrication of cylindrical ion trap mass spectrometer arrays for handheld chemical analyzers. Chem Eng Commun 195: 98-114.
240. Van Berkel GJ, Pasilis SP, Ovchinnikova O. 2008. Established and emerging atmospheric pressure surface sampling/ionization techniques for mass spectrometry. J Mass Spectrom 43: 1161-1180.
241. Velásquez-García LF, Akinwande AI. 2007. An out-of-plane MEMS quadrupole for a portable mass spectrometer. Proc. Transducers & Eurosensors '07 (14th Int Conf Solid-State Sensors, Actuators Microsystems, Lyon, France), Vol. 1: pp. 2315-2320.
242. Velásquez-García LF, Cheung K, Akinwande AI. 2008. An application of 3-D MEMS packaging: Out-of-plane quadrupole mass filters. J MEMS 17: 1430-1438.
243. Vollmer M, Hörth P, Rozing G, Couté Y, Grimm R, Hochstrasser D, Sanchez JC. 2006. Multi-dimensional HPLC/MS of the nucleolar proteome using HPLC-chip/MS. J Sep Sci 29: 499-509.
244. Vrouwe EX, Gysier J, Tjaden UR, van der Greef J. 2000. Chip-based capillary electrophoresis with an electrodeless nanospray interface. Rapid Commun Mass Spectrom 14: 1682-1688.
245. Wang XQ, Desai A, Tai YC, Licklider L, Lee TD. 1999. Polymer-based electrospray emitter chips for mass spectrometry. Proc MEMS '99 ( 12th Int Conf Micro Electro Mechanical Systems, Orlando, FL), Vol. 1: pp. 523-528.
246. Wang C, Oleschuk R, Ouchen F, Li J, Thibault P, Harrison DJ. 2000. Integration of immobilized trypsin bead beds for protein digestion within a microfluidic chip incorporating capillary electrophoresis separations and an electrospray mass spectrometry interface. Rapid Commun Mass Spectrom. 14: 1377-1383. (Pubitemid 30621964)
247. Wang YX, Cooper JW, Lee CS, DeVoe DL. 2004. Efficient electrospray ionization from polymer microchannels using integrated hydrophobic membranes. Lab Chip 4: 363-367.
248. Wapelhorst E, Hauschild JP, Mueller J. 2007. Complex MEMS: A fully integrated TOF micro mass spectrometer. Sens Actuators A 138: 22-27. (Pubitemid 47002248)
249. Wei J, Buriak JM, Siuzdak G, 1999. Desorption-ionization mass spectrometry on porous silicon. Nature 399: 243-246. (Pubitemid 29246449)
250. Wen J, Lin Y, Xiang F, Matson DW, Udseth HR, Smith RD. 2000. Microfabricated isoelectric focusing device for direct electrospray ionization-mass spectrometry. Electrophoresis 21: 191-197. (Pubitemid 30032713)
251. West J, Becker M, Tombrink S, Manz A. 2008. Micro total analysis systems: Latest achievements. Anal Chem 80: 4403-4419. (Pubitemid 351842328)
252. Whitten WB, Moxom J, Reilly PTA, Ramsey JM. 2001. Microchip ion trap mass spectrometry. Proc MicroTAS (5th International Conference on Miniaturized Systems for Chemistry and Life Sciences, Monterey, CA, Oct 2001), Vol. 1: pp. 210-212.
253. Wiberg DV, Myung NV, Eyre B, Shcheglov K, Orient OJ, Moore E, Munz P. 2003. LIGA-fabricated two-dimensional quadrupole array and scroll pump for miniature gas chromatograph/mass spectrometer. Proc SPIE (First Jet Propulsion Laboratory In Situ Instruments Workshop, Bellingham, WA), Vol. 4878: pp. 8-13.
254. Williams KR, Muller RS. 1996. Etch rates for micromachining processes. J MEMS 5: 256-269.
255. Williams KR, Gupta K, Wasilik M. 2003. Etch rates for micromachining processes-Part II. J MEMS 12: 761-778.
256. Wilm MS, Mann M. 1994. Electrospray and Taylor-Cone theory, doles beam of macromolecules at last. Int J Mass Spectrom Ion Processes 136: 167-180.
257. Wilm. M, Mann M. 1996. Analytical properties of the nanoelectrospray ion source. Anal Chem 68: 1-8. (Pubitemid 126681678)
258. Worgull M, Heckele M, Schomburg WK. 2005. Large-scale hot embossing. Microsyst Technol 12: 110-115.
259. Wright S, Syms RRA, O'Prey S, Hong G, Holmes AS. 2009. Comparison of ion coupling strategies for a microengineered quadrupole mass filter. J Am Soc Mass Spectrom 20: 146-156.
260. Xie J, Miao Y, Shih J, Tai YC, Lee TD. 2005. Microfluidic platform for liquid chromatography-tandem mass spectrometry analyses of complex peptide mixtures. Anal Chem 77: 6947-6953. (Pubitemid 41547290)
261. Xue Q, Foret F, Dunayevskiy YM, Zavracky PM, McGruer NE, Karger BL. 1997. Multichannel microchip electrospray mass spectrometry. Anal Chem 69: 426-430. (Pubitemid 27101319)
262. Yamashita M, Fenn JB. 1984. Electrospray ion-source-Another variation on the free-jet theme. J Phys Chem 88: 4451-4459.
263. Yang Y, Kameoka J, Wachs T, Henion JD, Craighead HG. 2004. Quantitative mass spectrometric determination of methylphenidate concentration in urine using an electrospray ionization source integrated with a polymer microchip. Anal Chem 76: 2568-2574. (Pubitemid 38585725)
264. Yang Y, Li C, Kameoka J, Lee KH, Craighead HG. 2005. A polymeric microchip with integrated tips and in situ polymerized monolith for electrospray mass spectrometry. Lab Chip 5: 869-876. (Pubitemid 41117315)
265. Yin H, Killeen K, Brennen R, Sobek D, Werlich M, van der Goor T. 2005. Microfluidic chip for peptide analysis with an integrated HPLC column, sample enrichment column, and nanoelectrospray tip. Anal Chem 77: 527-533. (Pubitemid 40116832)
266. Yoon HJ, Kim JH, Choi ES, Yang SS, Jung KW. 2002. Fabrication of a novel micro time-of-flight mass spectrometer. Sens Actuators A 97-98: 441-447. (Pubitemid 34758753)
267. Yoon HJ, Song SH, Hong NT, Jung KW, Lee SL, Yang SS. 2007. Fabrication of two types of micro ion sources for a micro time-of-flight mass spectrometer. J Micromech Microeng 17: 1542-1548.
268. Yu M, Fico M, Kothari S, Ouyang Z, Chappell WJ. 2006. Polymer-based ion trap chemical sensor. IEEE Sens J 6: 1429-1434. (Pubitemid 44955718)
269. Yuan CH, Shiea J. 2001. Sequential electrospray analysis using sharptip channels fabricated on a plastic chip. Anal. Chem 73: 1080-1083. (Pubitemid 32861888)
270. Zamfir AD, Bindila L, Lion N, Allen M, Girault HH, Peter-Katalinić J. 2005. Chip electrospray mass spectrometry for carbohydrate analysis. Electrophoresis 26: 3650-3673. (Pubitemid 41512018)
271. Zhang S, Van Pelt CK. 2004. Chip-based nanoelectrospray mass spectrometry for protein characterization. Expert Rev Proteomics 1: 449-468. (Pubitemid 43826411)
272. Zhang B, Liu H, Karger BL, Foret F. 1999. Microfabricated devices for capillary electrophoresis-electrospray mass spectrometry. Anal Chem 71: 3258-3264. (Pubitemid 29372747)
273. Zhang B, Foret F, Karger BL. 2000. A microdevice with integrated liquid junction for facile peptide and protein analysis by capillary electrophoresis/electrospray mass spectrometry. Anal Chem 72: 1015-1022. (Pubitemid 30127409)
274. Zhang J, Tan KL, Hong GD, Yang LJ, Gong HQ. 2001. Polymerization optimization of SU-8 photoresist and its applications in microfluidic systems and MEMS. J Micromech Microeng 11: 20-26. (Pubitemid 32138654)
275. Zheng Y, Li H, Guo Z, Lin JM, Cai Z. 2007. Chip-based CE coupled to a quadrupole TOF mass spectrometer for the analysis of a glycopeptide. Electrophoresis 28: 1305-1311. (Pubitemid 46723200)
276. Ziaie B, Baldi A, Lei M, Gu Y, Siegel RA. 2004. Hard and soft micromachining for BioMEMS: Review of techniques and examples of applications in microfluidics and drug delivery. Adv Drug Deliv Rev 56: 145-172. (Pubitemid 38114928)