Two-dimensional microfabricated electrostatic einzel lens

Sensors and Actuators, A: Physical

Volumn 107, Issue 3, 2003, Pages 285-295

  Syms, R R A ^a   Michelutti, L ^a   Ahmad, M M ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

Ion optics; Mass spectrometry; MEMS; Microfabrication

Indexed keywords

ANISOTROPY; COMPUTER SIMULATION; ELECTROSTATICS; FABRICATION; ION SOURCES; MASS SPECTROMETRY;

MICROFABRICATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0242569469     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.08.001     Document Type: Article

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