Fabrication and fluidic characterization of silicon micropillar array electrospray ionization chip

Sensors and Actuators, B: Chemical

Volumn 132, Issue 2, 2008, Pages 380-387

  Sainiemi, Lauri ^a   Nissilä, Teemu ^b   Jokinen, Ville ^a,c   Sikanen, Tiina ^b   Kotiaho, Tapio ^b   Kostiainen, Risto ^b   Ketola, Raimo A ^b   Franssila, Sami ^a  

^a AALTO UNIVERSITY   (Finland)

^b UNIVERSITY OF HELSINKI   (Finland)

^c BIOMEDICUM HELSINKI   (Finland)

Author keywords

Capillary filling; Electrospray ionization; Mass spectrometry; Microfluidics; Micropillars; Silicon microfabrication

Indexed keywords

ALUMINUM; CHANNEL FLOW; CHEMICAL ANALYSIS; ETCHING; IONIZATION; IONIZATION OF LIQUIDS; LIGHT METALS; LITHOGRAPHY; MASS SPECTROMETERS; MASS SPECTROMETRY; NONMETALS; PLASMA ETCHING; SENSITIVITY ANALYSIS; SILICA; SILICON; SPECTROMETRY; THREE DIMENSIONAL;

(100) SILICON; ALUMI NUM OXIDE; APPLIED (CO); CAPILLARY FORCES; CHIP FABRICATION; ELECTROSPRAY (ES); ELECTROSPRAY IONIZATION (ESI); ELECTROSPRAYING; ELSEVIER (CO); FABRICATION PROCESSES; FILLING PROPERTIES; FLOW CHANNELS; HIGH SENSITIVITY (HS); ISOTROPIC PLASMA; MASS SPECTROMETRIC ANALYSIS; MICRO PILLARS; MICROMACHINED; PHOTO MASKING; SAMPLE INTRODUCTION; SILICON DIOXIDES; THREE DIMENSIONAL (3D);

ELECTROSPRAY IONIZATION;

EID: 44649120771     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.09.077     Document Type: Article

References (23)

1. Foret F., and Kusy P. Microfluidics for multiplexed MS. Electrophoresis 27 (2006) 4877-4887
2. Xue Q., Foret F., Dunayevskiy Y.M., Zavracky P.M., McGruer N.E., and Karger B.L. Multichannel microchip electrospray mass spectrometry. Anal. Chem. 69 (1997) 426-430
3. Ramsey R.S., and Ramsey J.M. Generating electrospray from microchip devices using electroosmotic pumping. Anal. Chem. 69 (1997) 1174-1178
4. X.-Q. Wang, A. Desai, Y.-C. Tai, L. Licklider, T.D. Lee, Polymer-based electrospray chips for mass spectrometry, Proceedings of the Twelfth IEEE International Conference on Micro Electro Mechanical Systems (MEMS'99), Florida, USA, 17-21 January 1999, pp. 523-528.
5. Chiou C.-H., Lee G.-B., Hsu H.-T., Chen P.-W., and Liao P.-C. Micro devices integrated with channels and electrospray nozzles using PDMS casting techniques. Sens. Actuators, B Chem. 86 (2002) 1-7
6. Tuomikoski S., Sikanen T., Ketola R.A., Kostiainen R., Kotiaho T., and Franssila S. Fabrication of enclosed SU-8 tips for electrospray ionization-mass spectrometry. Electrophoresis 26 (2005) 4691-4702
7. A. Desai, Y.-C. Tai, M.T. Davis, T.D. Lee, A MEMS electrospray nozzle for mass spectrometry, Proceedings of the IEEE International Conference on Solid-State Sensors and Actuators (Transducers'97), Chicago, IL, USA, Vol. 2, 16-19 June 1997, pp. 927-930.
8. Zhang S., Van Pelt C.K., and Henion J.D. Automated chip-based nanoelectrospray-mass spectrometry for rapid identification of proteins separated by two-dimensional gel electrophoresis. Electrophoreses 24 (2003) 3620-3632
9. Arscott S., Le Gac S., and Rolando C. A polysilicon nanoelectrospray-mass spectrometry source based on a microfluidic capillary slot. Sens. Actuators, B Chem. 106 (2005) 741-749
10. Brinkmann M., Blossey R., Arscott S., Druon C., Tabourier P., Le Gac S., and Rolando C. Microfluidic design rules for capillary slot-based electrospray sources. Appl. Phys. Lett. 85 (2004) 2140-2142
11. de Boer M.J., Gardeniers J.G.E., Jansen H.V., Smulders E., Gilde M.-J., Roelofs G., Sasserath J.N., and Elwenspoek M. Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures. J. Microelectromech. Syst. 11 (2002) 385-401
12. Arscott S., and Troadec D. Electrospraying from nanofluidic capillary slot. Appl. Phys. Lett. 87 (2005) 134101
13. Sainiemi L., and Franssila S. Mask material effects in cryogenic deep reactive ion etching. J. Vac. Sci. Technol. B 25 (2007) 801-807
14. Grigoras K., Sainiemi L., Tiilikainen J., Säynätjoki A., Airaksinen V.-M., and Franssila S. Application of ultra-thin aluminium oxide etch mask made by atomic layer deposition technique. J. Phys: Conf. Ser. 61 (2007) 369-373
15. Fedynyshyn T.H., Grynkewich G.W., Hook T.B., Liu M.-D., and Ma T.-P. The effect of aluminum vs. photoresist masking on the etching rates of silicon and silicon dioxide in CF4/O2 plasmas. J. Electrochem. Soc. 134 (1987) 206-209
16. Zimmermann M., Schmid H., Hunziker P., and Delamarche E. Capillary pumps for autonomous capillary systems. Lab Chip 7 (2007) 119-125
17. Delamarche E., Bernard A., Schmid H., Bietsch A., Michel B., and Biebuyck H. Microfluidic networks for chemical patterning of substrates: design and application to bioassays. JACS 120 (1998) 500-508
18. Anderson H., van der Wijngaart W., Griss P., Niklaus F., and Stemme G. Hydrophobic valves of plasma deposited octafluorocyclobutane in DRIE channels. Sens. Actuators, B Chem. 75 (2001) 136-141
19. Romeo L.A., and Yost F.G. Flow in an open channel capillary. J. Fluid Mech. 322 (1996) 109-129
20. T. Nissilä, L. Sainiemi, T. Sikanen, T. Kotiaho, S. Franssila, R. Kostiainen, R. A. Ketola, Silicon micropillar array electrospray chip for drug and biomolecule analysis, Rapid Commun. Mass Spectrom., in press.
21. Alfazema L., Richards D., Gélébart S., Mitchell J., and Snowden M. Rapid, accurate and precise quantitative drug analysis: comparing liquid chromatography tandem mass spectrometry and chip-based nanoelectrospray ionisation mass spectrometry. Eur. J. Mass Spectrom. 11 (2005) 393-402
22. Dethy J.-M., Ackermann B.L., Delatour C., Henion J.D., and Schultz G.A. Demonstration of direct bioanalysis of drugs in plasma using nanoelectrospray infusion from a silicon chip coupled with tandem mass spectrometry. Anal. Chem. 75 (2003) 805-811
23. Mandel F., Côté L., and Vollmer M. Determination of low femtogram drug levels in serum by HPLC-Chip MS. Proceedings of 53th ASMS Conference on Mass Spectrometry and Allied Topics. San Antonio (2005)