Thermal optimization of micro-hotplates that have a silicon island

Journal of Micromechanics and Microengineering

Volumn 12, Issue 6, 2002, Pages 971-978

  Briand, Danick ^a   Heimgartner, Stephan ^a,b   Grétillat, Marc Alexis ^a,c   Van Der Schoot, Bart ^a   De Rooij, Nicolaas F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b Elmicron AG   (Switzerland)

^c Intersema Sensoric SA   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MOSFET DEVICES; OPTIMIZATION; TEMPERATURE DISTRIBUTION; THERMAL CONDUCTIVITY OF SOLIDS; THERMAL VARIABLES MEASUREMENT;

ELECTROTHERMAL SIMULATION; MICRO-HOTPLATES; SILICON ISLAND; SOFTWARE PACKAGE MEMCAD; THERMAL OPTIMIZATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0036851658     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/6/330     Document Type: Article

References (23)

1. Sberveglieri G, Hellmich W and Müller G 1997 Silicon hotplates for metal oxide gas sensor elements Microsyst. Technol. 3 183-90
2. Lee A P and Reedy B J 1999 Temperature modulation in semiconductor gas sensing Sensors Actuators B 60 35-42
3. Simon I, Barsan N, Bauer M and Weimar U 2001 Micromachined metal oxide gas sensors: opportunities to improve sensor performance Sensors Actuators B 73 1-26
4. Dibbern U 1990 A substrate for thin-film gas sensors in microelectronic technology Sensors Actuators B 2 63-70
5. Lang W 1990 Heat transport from a chip IEEE Trans. Electron Devices 37 958-63
6. Dillner U 1994 Thermal modeling of multilayer membranes for sensors applications Sensor Actuators A 41-42 260-7
7. Pike A and Gardner J W 1997 Thermal modelling and characterisation of micropower chemoresistive silicon sensors Sensors Actuators B 45 19-26
8. Briand D, Krauss A, van der Schoot B, Weimar U, Barsan N, Göpel W and de Rooij N F 1999 High temperature micro-hotplates for drop-coated gas sensors Sensors Actuators B 68 223-33
9. Briand D, van der Schoot B, Sundgren H, Lundström I and de Rooij N F 2000 A low-power micromachined MOSFET gas sensor J. Microelectromech. Syst. 9 303-8
10. Gotz A, Gràcia I, Cané C and Lora-Tamayo E 1997 Thermal and mechanical aspects for designing micromachined low-power gas sensors J. Micromech. Microeng. 7 247-9
11. Rossi C, Scheid E and Estève D 1997 Theoretical and experimental study of silicon micromachined microheater with dielectric stacked membranes Sensors Actuators A 63 183-9
12. 2 gas sensor using a FEM simulator Sensors Actuators A 69 205-11
13. Dumitrescu M, Cobianu C, Lungu D, Dascalu D, Pascu A, Kolev S and van den Berg A 1999 Thermal simulation of surface micromachined polysilicon hot plates of low power consumption Sensors Actuators A 76 51-6
14. Chih-Cheng L, Setiadi D, Udrea F, Milne W, Covington J A and Gardner J W 2000 3D therm-electro-mechanical simulations of gas sensors based on SOI membranes Proc. 3rd Int. Conf. on Modeling and Simulation of Microsystems pp 297-300
15. Microsom Technologies Inc., Development Center, 101 Rogers St., Suite 213, Cambridge, MA 02142, USA.
16. Puigcorbé J, Vilà A, Gràcia I, Cané C and Morante J R 2001 Dielectric micro-hotplate for integrated sensors: an electro-thermo-mechanical analysis Proc. 11th Int. Conf. on Solid-State Sensors and Actuators pp 312-5
17. Mielle P 1996 Managing dynamic thermal exchanges in commercial semiconducting gas sensors Sensors Actuators B 34 533-8
18. Mastrangelo C H, Tai Y C and Muller S 1990 Thermophysical properties of low-residual stress, silicon-rich, LPCVD silicon nitride films Sensors Actuators A 21-23 856-60
19. Manginell R P, Rosato D A, Benson D A and Frye-Mason G C 1999 Finite element modelling of microhotplate for microfluidic applications Proc. 2nd Int. Conf. on Modeling and Simulations of Microsystems pp 663-6
20. Slack G 1964 Thermal conductivity of pure and impure silicon, silicon carbide, and diamond J. App. Phys. 35 3460-6
21. Guidi V, Cardinali G C, Dori L, Faglia G, Ferroni M, Martinelli G, Nelli P and Sberveglieri G 1998 Thin-film gas sensor implementated on a low-power-consumption micromachined silicon structure Sensors Actuators B 49 88-92
22. Aigner R, Dietl M. Katterlober R and Klee V 1996 Si-planar-pellistor: designs for temperature modulated operation Sensors Actuators B 33 151-5
23. Chung W Y, Lim J W, Lee D D, Miura N and Yamazoe N 1999 Thermal and gas-sensing properties of planar-type micro gas sensor Sensors Actuators B 64 118-23