Microfabrication of cylindrical ion trap mass spectrometer arrays for handheld chemical analyzers

Chemical Engineering Communications

Volumn 195, Issue 2, 2008, Pages 98-114

  Van Amerom, Friso H W ^a   Chaudhary, Ashish ^a   Cardenas, Michelle ^a   Bumgarner, John ^a   Short, R Timothy ^a  

^a UNIVERSITY OF SOUTH FLORIDA   (United States)

Author keywords

Cylindrical ion trap arrays; Field emission; Mass spectrometry; MEMS; Microfabrication

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; ELECTRON EMISSION; IONIZATION; MICROFABRICATION; OPTIMIZATION; SILICON;

FIELD EMITTER ARRAYS; ION TRAP MASS SPECTROMETER;

MASS SPECTROMETERS;

CAPACITANCE; COMPUTER SIMULATION; ELECTRON EMISSION; IONIZATION; MASS SPECTROMETERS; MICROFABRICATION; OPTIMIZATION; SILICON;

EID: 37549000964     PISSN: 00986445     EISSN: 15635201     Source Type: Journal    
DOI: 10.1080/00986440701569176     Document Type: Article

References (38)

1. Abon, M. and Teichner, S. J. (1967) Field emission study of adsorption of oxygen hydrogen and nitrogen by a molybdenum tip. Nuovo Cimento, 5:2
2. Badman, E. R. and Cooks, R. G. (2000) Special feature: Perspective - Miniature mass analyzers. J. Mass Spectrom., 35, pp. 659-671.
3. Badman, E. R. and Cooks, R. G. (2000) A parallel miniature cylindrical ion trap array. Anal. Chem., 72, pp. 3291-3297.
4. Blain, M. G., Riter, L. S., Cruz, D., Austin, D. E., Wu, G., Plass, W. R. and Cooks, R. G. (2004) Towards the hand-held mass spectrometer: Design considerations, simulation, and fabrication of micrometer-scaled cylindrical ion traps. Int. J. Mass Spectrom., 236, pp. 91-104.
5. Busta, H. H. (1992) Vacuum microelectronics-1992. J. Micromech. Microeng., 2, pp. 43-74.
6. Chaudhary, A., van Amerom, F. H. W., Short, R. T. and Bhansali, S. (2006) Fabrication and testing of a miniature cylindrical ion trap mass spectrometer constructed from low temperature co-fired ceramics. Int. J. Mass Spectrom., 251, pp. 32-39.
7. Choi, W. B., Chung, D. S., Kang, H. J., Kim, H. Y., Jin, W. Y., Han, I. T., Lee, Y. H., Jung, J. E., Lee, N. S., Park, G. S. and Kim, J. M. (1999) Fully sealed, high-brightness carbon-nanotube field-emission display. Appl. Phys. Lett., 75, pp. 3129-3131.
8. Cooks, R. G., Ouyang, Z., Takats, Z. and Wiseman, M. W. (2006) Ambient mass spectrometry. Science, 311, pp. 1566-1570.
9. Cruz, D. and Blain, M. (2004) Field emission characteristics of a tungsten microelectromechanical system device. Appl. Phys. Lett., 86, p. 153502.
10. Dahl, D. A. (2003) SIMION for the personal computer in reflection. Int. J. Mass Spectrom., 200, pp. 3-25.
11. Ferran, R. J. and Boumsellek, S. (1996) High-pressure effects in miniature arrays of quadrupole analyzers for residual gas analysis from 10(-9) to 10(-2) Torr. J. Vac. Sci. Technol. A, 14, pp. 1258-1265.
12. Ferran, R. J. and Boumsellek, S. (2001) Trade-offs in miniature quadrupole designs. J. Am. Soc. Mass Spectrom., 12, pp. 633-640.
13. Forbes, M. W., Sharifi, M., Croley, T., Lausevic, Z. and March, R. E. (1999) Simulations of ion trajectories in a quadrupole ion trap: A comparison, of three simulation programs. J. Mass Spectrom., 34, pp. 1219-1239.
14. Fowler, R. H. and Nordheim, L. W. (1928) Electron emission in intense electric fields. Proc. R. Soc. Lond. Ser. A, pp. 173-181.
15. Fursey, G. (2005) Field Emission in Vacuum Microelectronics, Kluwer Academic/Plenum Publishers, New York
16. Gao, L., Song, Q., Patterson, G. E., Cooks, R. G. and Ouyang, Z. (2006) Handheld rectilinear ion trap mass spectrometer. Anal. Chem., 78, pp. 5994-6002.
17. Gross, G. M., Reid, V. R. and Synovec, R. E. (2005) Recent advances in instrumentation for gas chromatography. Curr. Anal. Chem, 1:2, pp. 135-147.
18. Hauschild, J.-P., Wapelhorst, E., Müller, J. and Doms, M. (2005) Ninth International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS), 1, pp. 476-478.
19. Itoh, S., Niiyama, T. and Yokoyama, M. (1993) Influences of gases on the field emission. J. Vac. Sci. Technol. B, 11, pp. 647-650.
20. Kilgour, D. P., Cairns, S. N., Groves, D. M., Kent, B. J., Aplin, K., Huq, S. U. and Stevens, R. (2004) Features of failure of coated silicon field emitter ionisation sources at relatively high pressure. Proceedings of the 52nd ASMS Conference of Mass Spectrometry and Allied Topics
21. Kornienko, O., Reilley, P. T. A., Whitten, W. B. and Ramsey, J. M. (2000) Field-emission cold-cathode E! source for a microscale ion trap mass spectrometer. Anal. Chem., 72, pp. 559-562.
22. Lammert, S. A., Rockwood, A. A., Wang, M., Lee, M. L., Lee, E. D., Tolley, S. E., Oliphant, J. R., Jones, J. L. and Wait, R. W. (2006) Miniature toroidal radio frequency ion trap mass analyzer. J. Am. Soc. Mass Spectrom., 17, pp. 916-922.
23. Liu, X. and Pawliszyn, J. (2005) On-site environmental analysis by membrane extraction with a sorbent interface combined with a portable gas chromatograph system. Int. J. Environ. Anal. Chem., 85, pp. 1189-1200.
24. Orient, O. J., Chutjian, A. and Garkanian, V. (1997) Miniature, high-resolution, quadrupole mass-spectrometer array. Rev. Sci. Instrum., 68, pp. 1393-1397.
25. Pau, S., Pai, C. S., Low, J. L., Moxom, J., Reilly, P. T. A., Whitten, W. B. and Ramsey, J. M. (2006) Microfabricated quadrupole ion trap for mass spectrometer applications. Phys. Rev. Lett., 96, p. 120801.
26. Rangsten, P., Ribbing, C., Strandman, C., Hök, B. and Smith, L. (2000) Field-emitting structures intended for a miniature X-ray source. Sens. Actuators, 82, pp. 24-29.
27. Shoulders, K. R. (1961) Microelectronics using electron beam activated machining techniques. Adv. Comput., 2, pp. 135-293.
28. Siebert, P., Petzhold, G., Hellenbart, A. and Müller, J. (1998) Surface microstruture miniature mass spectrometer: Processing and applications. Appl. Phys. A, 67, pp. 155-160.
29. Spindt, C. A., Brodie, I., Humphrey, L. and Westerberg, E. R. (1976) Physical properties of thin-film field emission cathodes with molybdenum cones. J. Appl. Phys., 47, pp. 5248-5263.
30. Taylor, S., Tindall, R. F. and Syms, R. A. (2001) Silicon based quadruple mass spectrometry using micromechanical systems. J. Vac. Sci. Technol. B, 19, pp. 557-562.
31. Temple, D., Palmer, W. D., Yadon, L. N., Mancusi, J. E., Vellenga, D. and McGuire, G. E. (1998) Silicon field emitter cathodes: Fabrication, performance, and applications. J. Vac. Sci. Technol. A, 16, pp. 1980-1990.
32. Tucek, J. C., Krauss, A. R., Gruen, D. N., Auciello, O., Moldovan, N., Mancini, D. C., Zurn, S. and Polla, D. (2000) Development of edge field emission cold cathodes based on low work function Cu-Li alloy coatings. J. Vac. Sci. Technol. B, 18, pp. 2427-2432.
33. Wenner, P. G., Bell, R. J., van Amerom, F. H. W., Toler, S. K., Edkins, J. E., Hall, M. L., Koehn, K., Short, R. T. and Byrne, R. H. (2004) Environmental chemical mapping using an underwater mass spectrometer. Trends Anal. Chem., 23, pp. 288-295.
34. Whitten, W. B., Reilly, P. T. A. and Ramsey, J. M. (2004) High-pressure ion trap mass spectrometry. Rapid Commun. Mass Spectrom., 18, pp. 1749-1752.
35. Williams, K. R. and Muller, R. S. (1992) IC-processed hot-filament vacuum microdevices. Tech. Dig. Int. Electron Devices Meet., pp. 387-390.
36. Wood, R. W. A new form of cathode discharge and the production of X-rays, together with some notes of diffraction. Phys. Rev., 5, pp. 1-10.
37. Wu, G., Cooks, R. G. and Ouyang, Z. (2005) Geometry optimization for cylindrical ion trap: Field calculations, simulations and experiments. Int. J. Mass Spectrom., 241, pp. 119-132.
38. Yadon, L. N., Temple, D., Palmer, W. D., Ball, C. A. and McGuire, G. E. (1995) Minicolumn silicon field-emitter arrays. J. Vac. Sci. Technol. B, 13, pp. 580-584.