Chemical sensing using nonoptical microelectromechanical systems

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 4, 1999, Pages 2300-2307

  Freidhoff, C B ^a   Young, R M ^a   Sriram, S ^a   Braggins, T T ^a   O'Keefe, T W ^a,d   Adam, J D ^a   Nathanson, H C ^a   Syms, R R A ^b   Tate, T J ^b   Ahmad, M M ^b   Taylor, S ^c   Tunstall, J ^c  

^a NORTHROP GRUMMAN CORPORATION   (United States)

^b IMPERIAL COLLEGE LONDON   (United Kingdom)

^c UNIVERSITY OF LIVERPOOL   (United Kingdom)

^d Posthumous ^*  (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSING; COMMONLY USED; INTEGRATED CIRCUIT INDUSTRIES; LORENTZ; MASS FILTER; MECHANICAL SENSORS; MEMS CHEMICAL SENSORS; MEMS FABRICATION TECHNIQUES; MICRO ELECTRO MECHANICAL SYSTEM; MICROELECTROMECHANICAL SYSTEMS; QUADRUPOLES;

CHEMICAL SENSORS; DETECTORS; MASS SPECTROMETERS; MASS SPECTROMETRY; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES;

COMPOSITE MICROMECHANICS;

EID: 0013341292     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581764     Document Type: Conference Paper

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