Fabrication of a microengineered quadrupole electrostatic lens

Electronics Letters

Volumn 32, Issue 22, 1996, Pages 2094-2095

  Syms, R R A ^a   Tate, T J ^a   Ahmad, M M ^a   Taylor, S ^b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b UNIVERSITY OF LIVERPOOL   (United Kingdom)

Author keywords

Electrostatic lenses; Micromachining

Indexed keywords

ANISOTROPY; ELECTRODES; ETCHING; MASS SPECTROMETERS; MATHEMATICAL MODELS; MICROMACHINING; SEMICONDUCTING SILICON;

MINIATURE QUADRUPOLE ELECTROSTATIC LENSES;

ELECTROSTATIC LENSES;

EID: 0030264982     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19961362     Document Type: Article

References (8)

1. DAWSON, P.H.: 'Quadrupole mass spectrometry and its applications' (Elsevier Scientific Publishing Co., Amsterdam, 1976)
2. BATEY, J.H.: 'Quadrupole gas analysers (residual gas analysis)', Vacuum, 1987, 37, (8-9), pp. 659-668
3. DAYTON, I.E., SHOEMAKER, F.C., and MOZLEY, R.F.: 'The measurement of two-dimensional fields. Part II: Study of a quadrupole magnet', Rev. Sci. Instrum., 1954, 25, pp. 485-489
4. AUSTIN, W.E., HOLME, A.E., and LECK, J.H.: The mass filter: Design and performance' (Chap. 10 in 'Quadruple mass spectrometry and its applications, Elsevier, Amsterdam, 1976, pp. 121-152)
5. FERRAN, J.: 'Residual gas analyser utilizing a miniature quadrupole array'. US Patent 5,401,962, 28 March, 1995
6. TAYLOR, S., SYMS, R.R.A., DOREY, H.A., and TATE, T.J.: 'Improvements in and relating to quadrupole mass spectrometers'. British Patent 9506972.0, 1995
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8. DENISON, D.R.: 'Operating parameters of a quadrupole in a grounded cylindrical housing', J. Vac. Sci. Tech., 1971, 8, pp, 266-269