Room temperature bonding of micromachined glass devices for capillary electrophoresis

Sensors and Actuators, B: Chemical

Volumn 63, Issue 3, 2000, Pages 147-152

  Chiem, Nghia ^a   Lockyear Shultz, Loranelle ^a   Andersson, Per ^a   Skinner, Cameron ^a   Harrison, D Jed ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARY FLOW; ELECTROPHORESIS; MICROMACHINING; SEPARATION; SUBSTRATES; THERMAL EXPANSION;

CAPILLARY ELECTROPHORESIS;

GLASS BONDING;

EID: 0033732459     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(00)00351-8     Document Type: Article

References (20)

1. Manz A., Fettinger J.C., Verpoorte E., Lüdi H., Widmer H.M., Harrison D.J. Micromachining of monocrystalline silicon and glass for chemical analysis systems: a look into next century's technology or just a fashionable craze? Trends Anal. Chem. 10:1991;144-149.
2. Harrison D.J., Manz A., Fan Z., Lüdi H., Widmer H.M. Capillary electrophoresis and sample injection systems integrated on a planar glass chip. Anal. Chem. 64:1992;1926-1932.
3. Seiler K., Harrison D.J., Manz A. Planar glass chips capillary electrophoresis: repetitive sample injection, quantitation and separation efficiency. Anal. Chem. 65:1993;1481-1488.
4. Effenhauser C.S., Manz A., Widmer H.M. Glass chips for high-speed capillary electrophoresis separations with submicrometer plate heights. Anal. Chem. 65:1993;2637-2642.
5. Harrison D.J., Fluri K., Seiler K., Fan Z., Effenhauser C.S., Manz A. Micromachining a miniaturized capillary electrophoresis-based chemical analysis system on a chip. Science. 261:1993;895-897.
6. Fan Z., Harrison D.J. Micromachining of capillary electrophoresis injectors and separators on glass chips and evaluation of flow at capillary intersections. Anal. Chem. 66:1994;177-184.
7. Jacobson S.C., Hergenröder R., Koutny L.B., Warmack R.J., Ramsey J.M. Effects of injection schemes and column geometry on the performance of microchip electrophoresis devices. Anal. Chem. 66:1994;1107-1113.
8. Seiler K., Fan Z., Fluri K., Harrison D.J. Electroosmotic pumping and valveless control of fluid flow within a manifold of capillaries on a glass chip. Anal. Chem. 66:1994;3485-3491.
9. Harrison D.J., Fluri K., Chiem N., Tang T., Fan Z. Micromachining chemical and biochemical analysis and reaction systems on glass substrates. Technical Digest, Transducers 95, 8th Intl. Conf. Solid-State Sensors Actuat., Stockholm, June 25-29. 1995;752-755.
10. Jacobson S.C., Moore A.W., Ramsey J.M. Fused quartz substrates for microchip electrophoresis. Anal. Chem. 67:1995;2059-2063.
11. Fluri K., Fitzpatrick G., Chiem N., Harrison D.J. Integrated capillary electrophoresis devices with an efficient postcolumn reactor in planar quartz and glass chips. Anal. Chem. 68:1996;4285-4290.
12. Bengtsson S. Semiconductor wafer bonding: a review of interfacial properties and applications. J. Electron. Mater. 21:1992;841-862.
13. Schmidt M. Silicon wafer bonding for micromechanical devices. Technical Digest, Solid State Sensor Actuator Workshop, Hilton Head Island, SC, June 13-66. 1994;127-131.
14. Holland L. The Properties of Glass Surfaces. 1964;119 Wiley, New York.
15. Holland L. The Properties of Glass Surfaces. 1964;68 Wiley, New York.
16. Chiem N., Harrison D.J. Microchip-based capillary electrophoresis for immunoassays: analysis of antibodies and theophylline. Anal. Chem. 69:1997;373-378.
17. Wang H.Y., Foote R.S., Jacobson S.C., Schneibel J.H., Ramsey J.M. Low temperature bonding for microfabrication of chemical analysis devices. Sens. Actuators, B. 45:1997;199-207.
18. Sobek D., Young A.M., Gray M.L., Senturia S.D. A microfabricated flow chamber for optical measurements in fluids. Proc. IEEE Micro-Electromechanical Systems Workshop, Fort Lauderdale, FL, Feb 7-10. 1993;219-224.
19. Harlow E., Lane D. Antibodies: A Laboratory Manual. 1988;354-355 Cold Spring Harbor Laboratory, Cold Spring Harbor, NY.
20. Chiem N., Harrison D.J. Monoclonal antibody binding affinity determined by microchip-based capillary electrophoresis. Electrophoresis. 19:1998;3040-3044.