Fully batch-fabricated linear quadrupole mass filters

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2008, Pages 316-319

  Cheung, K ^a   Velasquez Garcia L F ^a   Akinwande, A I ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRODES; MICROSYSTEMS; SOLID-STATE SENSORS;

APPLIED VOLTAGES; DRIVING FREQUENCIES; ELECTRODE ASSEMBLIES; ELECTRODE DIAMETERS; INTEGRATED ION OPTICS; POST-FABRICATION; QUADRUPOLE MASS FILTERS; STABILITY REGIONS;

FABRICATION;

EID: 77953265035     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2008.82     Document Type: Conference Paper

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