A microfabricated Pirani pressure sensor operating near atmospheric pressure

Journal of Micromechanics and Microengineering

Volumn 15, Issue 8, 2005, Pages 1504-1510

  Doms, Marco ^a   Bekesch, Andre ^a   Mueller, Joerg ^a  

^a HAMBURG UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; ELECTRIC HEATING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PRESSURE EFFECTS; THERMAL CONDUCTIVITY;

MICROFABRICATION; PIRANI PRINCIPLE; PRESSURE SENSORS; SENSOR GEOMETRIES;

SENSORS;

EID: 22644434987     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/8/018     Document Type: Article

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