Micromachined mass spectrometer

Sensors and Actuators, B: Chemical

Volumn 83, Issue 1-3, 2002, Pages 129-137

  Sillon, Nicolas ^a,b   Baptist, Robert ^a  

^a CEA LETI   (France)

^b GRENOBLE INSTITUTE OF TECHNOLOGY   (France)

Author keywords

Gas analysis; Ionisation; Leak detection; Miniature mass spectrometer; Silicon micromachining

Indexed keywords

IONIZATION CHAMBERS; LEAK DETECTION; MASS SPECTROMETERS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING;

MINIATURE MASS SPECTROMETERS;

SILICON SENSORS;

EID: 0037086359     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)01070-X     Document Type: Conference Paper

References (7)

1. Design of a microengineered electrostatic quadrupole lens
2. Chemical sensing using non-optical microelectromechanical systems
3. Surface microstructure/miniature mass spectrometer: Processing and applications
4. A vacuum gauge with microtips: The Orbitip gauge
5. A micromachined electron beam ion source
6. SIMION 3D version 6