Surface microstructure/miniature mass spectrometer: Processing and applications

Applied Physics A: Materials Science and Processing

Volumn 67, Issue 2, 1998, Pages 155-160

  Siebert, P ^a   Petzold, G ^a   Hellenbart, A ^a   Muller J ^a  

^a HAMBURG UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; DEPOSITION; ELECTRON SOURCES; ELECTROPLATING; ETCHING; IONIZATION; MICROSTRUCTURE; MINIATURE INSTRUMENTS; PARTICLE OPTICS; PLASMA SOURCES; SURFACE STRUCTURE; THIN FILMS;

ANODIC BONDING; MASS SEPARATORS;

MASS SPECTROMETERS;

EID: 0032137381     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390050754     Document Type: Article

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