Design of a microengineered electrostatic quadrupole lens

IEEE Transactions on Electron Devices

Volumn 45, Issue 11, 1998, Pages 2304-2311

  Syms, Richard R A ^a,b   Tate, Thomas J ^b   Ahmad, Munir M ^b   Taylor, Stephen ^a,c  

^a IEEE   (United Kingdom)

^b IMPERIAL COLLEGE LONDON   (United Kingdom)

^c UNIVERSITY OF LIVERPOOL   (United Kingdom)

Author keywords

Mass spectrometer; Microengineering; Quadrupole lens; Residual gas analysis

Indexed keywords

ELECTRODES; FINITE DIFFERENCE METHOD; MASS SPECTROMETERS; SEMICONDUCTING GLASS; SEMICONDUCTING SILICON;

ELECTROSTATIC QUADRUPOLE LENSES; MICROENGINEERING;

ELECTROSTATIC LENSES;

EID: 0032206424     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.726645     Document Type: Article

References (31)

1. W. A. Bryden, R. C. Benson, S. A. Ecelberger, T. E. Phillips, R. J. Cotter, and C. Fenselau, "The tiny TOP mass spectrometer for chemical and biological sensing," Johns Hopkins APL Tech. Dig., vol. 16, pp. 296-310, 1995.
2. W. A. Bryden, R. C. Benson, S. A. Ecelberger, T. E. Phillips, T. Cornish, and R. J. Cotter, "Tiny-TOF-MALDI mass spectrometry for particulate drug and explosives detection," Proc. SPIE, vol. 2511, pp. 153-164, 1995.
3. W. A. Bryden, R. C. Benson, H. W. Ko, and M. Donlon, "Universal agent sensor for counterproliferation applications," Johns Hopkins APL Dig., vol. 18, pp. 302-308, 1997.
4. F. C. Sittler, "Micromachined mass spectrometer," U.S. Patent 5401963, 1995.
5. C. B. Freidhoff, R. M. Young, and S. Sriram, "Solid state micromachined mass spectrograph universal gas detection sensor," U.S. Patent 386 115, 1995.
6. H. Nathanson, I. Liberman, and C. Freidhoff, "Novel functionality using microgaseous devices," in Proc. MEMS '95. Amsterdam, The Netherlands, 1995, pp. 72-76.
7. C. Freidhoff, "Mass spectrograph on a chip," in Proc. 1997 IEEE Aerospace Conf., Aspen, CO, vol. 3, p. 32, Feb. 1-8, 1997.
8. R. J. Ferran, "Residual gas sensor utilizing a miniature quadrupole array," U.S. Patent 5401962, 1995.
9. -2 torr," J. Vac. Sci. Technol. A. vol. 14, pp. 1258-1265, 1996.
10. A. Chutjian, M. H. Hecht, and O. J. Orient, "Miniature quadrupole mass spectrometer array," U.S. Patent 5719393, 1996.
11. O. J. Orient, A. Chutjian, and V. Garkanian, "Miniature, high-resolution, quadrupole mass-spectrometer array," Rev. Sci. Instrum., vol. 68, pp. 1393-1397, 1997.
12. S. Hiroki, T. Abe, Y. Murakami, Y. Takano, M. Higuchi, and M. Miyake, "Development of a QMS with a ceramic single-piece quadrupole," Vacuum, vol. 44, pp. 71-74, 1993.
13. C. Milne, "LIGA fabricated quadrupolar mass spectrometer array," [Online]. Available at www.nsls.bnl.gov/BeamRD/Chris/jp102.jpg.
14. D. B. Salzman, "Mass spectrometer using quadrupolar axialization," NASA Small Business Innovation Research Program Proposal, 13.01-8965, 1995.
15. S. Taylor, R. R. A. Syms, H. A. Dorey, and T. J. Tate, "Improvements in and relating to quadrupole mass spectrometers," British Patent 9506972.0, 1995.
16. R. R. A. Syms, T. J. Tate, M. A. Ahmad, and S. Taylor, "Fabrication of a microengineered quadrupole electrostatic lens," Electron. Lett., vol. 32, pp. 2094-2095, 1996.
17. S. Taylor, J. J. Tunstall, R. R. A. Syms, T. J. Tate, and M. M. Ahmad, "Initial results for a quadrupole mass spectrometer with a silicon micromachined mass filter," Electron. Lett., vol. 34, pp. 546-547, 1998.
18. S. Taylor, J. J. Tunstall, J. H. Kleck, R. Tindall, P. Julian, J. Batey, R. R. A. Syms, T. J. Tate, and M. M. Ahmad, "Performance improvements for a miniature quadrupole with a micromachined mass filter," in Proc. 14th Int. Vacuum Congr., (IVC-14), Birmingham, U.K., Aug. 31-Sept. 4, 1998.
19. W. Paul, "Electromagnetic traps for charged and neutral particles," Rev. Mod. Phys., vol. 62, pp. 531-540, 1990.
20. P. H. Dawson, Quadrupole Mass Spectrometry and Its Applications. Amsterdam, The Netherlands: Elsevier, 1976.
21. J. H. Batey, "Quadrupole gas analyzers," Vacuum, vol. 37, pp. 659-668, 1987.
22. W. C. Elmore and M. W. Garrett, "Measurement of two-dimensional fields. Part I: Theory," Rev. Sci. Instrum., vol. 25, pp. 480-485, 1954.
23. I. E. Dayton, F. C. Shoemaker, and R. F. Mozley, "The measurement of two-dimensional fields. Part II: Study of a quadrupole magnet," Rev. Sci. Instrum., vol. 25, pp. 485-489, 1954.
24. D. R. Denison, "Operating parameters of a quadrupole in a grounded cylindrical housing," J. Vac. Sci. Technol., vol. 8, pp. 266-269, 1971.
25. W. E. Austin, A. E. Holme, and J. H. Leck, "The mass filter: Design and performance," in Quadrupole Mass Spectrometry and Its Applications. Amsterdam, The Netherlands: Elsevier, 1976, ch. 6.
26. D. B. Lee, "Anisotropic etching of silicon," J. Appl. Phys., vol. 40, pp. 4569-4574, 1969.
27. K. E. Bean, "Anisotropic etching of silicon," IEEE Trans. Electron Devices, vol. ED-25, pp. 1185-1193, 1978.
28. C. M. Schroeder, "Accurate silicon spacer chips for an optical fiber cable connector," Bell. Syst. Tech. J., vol. 57, pp. 91-97, 1977.
29. Y. Fujii, J. Minowa, and N. Suzuki, "Demountable multiple connector with precise V-grooved silicon," Electron. Lett., vol. 15, pp. 424-425, 1979.
30. P. C. Chang, S. Sriram, and A. C. Wey, "Multiple fiber interconnect using silicon V-grooves," Proc. SPIE, vol. 836, pp. 311-318, 1987.
31. A. S. Holmes and R. R. A. Syms, "Self-aligning guided wave breadboard system for delay line signal processing," in Proc. 7th Int. Conf. on Fiber Optics Optoelectronics, London, U.K., Apr. 25-27, 1989, pp. 3.4-3.9.