메뉴 건너뛰기




Volumn , Issue , 2007, Pages 2315-2320

AN out-of-plane MEMS quadrupole for a portable mass spectrometer

Author keywords

Mass filter; Out of plane quadrupole; Portable mass spectrometry

Indexed keywords

ASPECT RATIO; COMPOSITE MICROMECHANICS; MASS SPECTROMETRY; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; OPTICAL DESIGN; SENSORS; TRANSDUCERS;

EID: 50049112327     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300633     Document Type: Conference Paper
Times cited : (15)

References (10)
  • 2
    • 0001317310 scopus 로고
    • The Measurement of Two-dimensional Fields, Part II: Study of a Quadrupole Magnet
    • I. E. Dayton, F. C. Shoemaker, and R. F. Mozley, The Measurement of Two-dimensional Fields, Part II: Study of a Quadrupole Magnet, Rev. Sci. Instrum., Vol. 25, pp. 485-489, 1954.
    • (1954) Rev. Sci. Instrum , vol.25 , pp. 485-489
    • Dayton, I.E.1    Shoemaker, F.C.2    Mozley, R.F.3
  • 3
    • 0000439125 scopus 로고    scopus 로고
    • High-pressure Effects in Miniature Arrays of Quadrupole Analyzers for Residual Gas Analysis from 10-9 to 10-2 Torr
    • R. J. Ferran and S. Boumsellek, High-pressure Effects in Miniature Arrays of Quadrupole Analyzers for Residual Gas Analysis from 10-9 to 10-2 Torr, J. Vac. Sci. Technol., Vol A 14 No 3, pp. 1258-1265, 1996.
    • (1996) J. Vac. Sci. Technol , vol.A 14 , Issue.3 , pp. 1258-1265
    • Ferran, R.J.1    Boumsellek, S.2
  • 4
    • 0001615664 scopus 로고    scopus 로고
    • O. J. Orient, Chutjian A., and Garkanian V. Miniature, High Resolution, Quadrupole Mass Spectrometer Array, Rev. Sci. Instrum., 68, pp. 1393-1397, 1997.
    • O. J. Orient, Chutjian A., and Garkanian V. Miniature, High Resolution, Quadrupole Mass Spectrometer Array, Rev. Sci. Instrum., vol. 68, pp. 1393-1397, 1997.
  • 5
    • 0032206424 scopus 로고    scopus 로고
    • Design of a Microengineered Electrostatic Quadrupole Lens
    • R. Syms, T. J. Tate, M. M. Ahmad, and S. Taylor, Design of a Microengineered Electrostatic Quadrupole Lens, IEEE Trans. Electron Devices, Vol. 45, No. 11, pp. 2304-2311, 1998.
    • (1998) IEEE Trans. Electron Devices , vol.45 , Issue.11 , pp. 2304-2311
    • Syms, R.1    Tate, T.J.2    Ahmad, M.M.3    Taylor, S.4
  • 6
    • 27644526429 scopus 로고    scopus 로고
    • Monolithic MEMS Quadrupole Mass Spectrometers by Deep Silicon Etching
    • M. Geear, R. A. Syms, S. Wright, and A. S. Holmes, Monolithic MEMS Quadrupole Mass Spectrometers by Deep Silicon Etching, J. Microelectromech. Sys., Vol. 14, No. 5, pp. 1156-1166,2005.
    • (2005) J. Microelectromech. Sys , vol.14 , Issue.5 , pp. 1156-1166
    • Geear, M.1    Syms, R.A.2    Wright, S.3    Holmes, A.S.4
  • 8
    • 0034782798 scopus 로고    scopus 로고
    • Numerical Investigation of the Effect of Electrode Size on the Behavior of Quadrupole Mass Filters
    • J. R. Gibson and S. Taylor, Numerical Investigation of the Effect of Electrode Size on the Behavior of Quadrupole Mass Filters, Rapid Commun. Mass Spectrom, Vol 15, pp. 1960-1964, 2001.
    • (2001) Rapid Commun. Mass Spectrom , vol.15 , pp. 1960-1964
    • Gibson, J.R.1    Taylor, S.2
  • 9
    • 34547824552 scopus 로고    scopus 로고
    • Precision Hand Assembly of MEMS subsystems using DRIE-patterned Deflection Spring Structures: An Example of an Out-of-plane Substrate Assembly, accepted
    • L. F. Velásquez-García, A. I. Akinwande, and M. Martínez-Sánchez, Precision Hand Assembly of MEMS subsystems using DRIE-patterned Deflection Spring Structures: An Example of an Out-of-plane Substrate Assembly, accepted, J. Microelectromech. Sys.
    • J. Microelectromech. Sys
    • Velásquez-García, L.F.1    Akinwande, A.I.2    Martínez-Sánchez, M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.