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Volumn , Issue , 2007, Pages 2315-2320
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AN out-of-plane MEMS quadrupole for a portable mass spectrometer
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Author keywords
Mass filter; Out of plane quadrupole; Portable mass spectrometry
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Indexed keywords
ASPECT RATIO;
COMPOSITE MICROMECHANICS;
MASS SPECTROMETRY;
MEMS;
MICROELECTROMECHANICAL DEVICES;
MICROSYSTEMS;
OPTICAL DESIGN;
SENSORS;
TRANSDUCERS;
3-D PACKAGING;
DYNAMIC RANGE;
INTERNATIONAL CONFERENCES;
MASS FILTER;
MESO-SCALE;
OUT-OF PLANE;
OUT-OF-PLANE QUADRUPOLE;
PEAK WIDTHS;
PORTABLE MASS SPECTROMETRY;
QUADRUPOLE;
QUADRUPOLE MASS;
QUADRUPOLES;
RF FREQUENCIES;
SOLID-STATE SENSORS;
STABILITY REGIONS;
ACTUATORS;
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EID: 50049112327
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/SENSOR.2007.4300633 Document Type: Conference Paper |
Times cited : (15)
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References (10)
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