Cold cathode field emitter array on a quadrupole mass spectrometer: Route to miniaturization

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 5, 1999, Pages 1993-1996

  Felter, T E ^a,b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22844456113     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590859     Document Type: Article

References (6)

1. W. Paul and H. Steinwedel, Z. Naturforsch. A 8, 448 (1953); German Patent No. 944,900 (1956); U.S. Patent No. 2,939,952 (1960).
2. Quadrupole Mass Spectrometry and its Applications, edited by P. H. Dawson (Elsevier, Amsterdam, 1976); see especially Chap. 6, pp. 129 and 151.
3. R. J. Ferran and S. Boumsellek, J. Vac. Sci. Technol. A 14, 1258 (1996).
4. C. A. Spindt, Surf. Sci. 266, 145 (1992);
5. I. Brodie and C. A. Spindt, Advances in Electronics and Electron Physics, edited by P. W. Hawkes (Academic, New York, 1992), p. 89.
6. Papers from recent gatherings of the International Conference on Vacuum Microelectronics can be found in J. Vac. Sci. Technol. B 14 (1996).