Microfabricated quadrupole ion trap for mass spectrometer applications

Physical Review Letters

Volumn 96, Issue 12, 2006, Pages

  Pau, S ^a,b   Pai, C S ^b   Low, Y L ^b   Moxom, J ^c   Reilly, P T A ^c   Whitten, W B ^c   Ramsey, J M ^d  

^a UNIVERSITY OF ARIZONA   (United States)

^b LUCENT TECHNOLOGIES   (United States)

^c OAK RIDGE NATIONAL LABORATORY   (United States)

^d UNIVERSITY OF NORTH CAROLINA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; PHOSPHORUS; POLYSILICON; SILICA; SILICON; SPECTROMETERS;

OPERATING PRESSURES; QUADRUPOLE ION TRAPS; SCALINGS; SILICON MICROMACHINING;

ION SOURCES;

EID: 33645514593     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/physrevlett.96.120801     Document Type: Article

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