Powder blasting for three-dimensional microstructuring of glass

Sensors and Actuators, A: Physical

Volumn 86, Issue 3, 2000, Pages 231-237

  Belloy, E ^a   Sayah, A ^a   Gijs, M A M ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; EROSION; ETCHING; MASKS; POWDERS;

POWDER BLASTING;

GLASS;

EID: 0034324286     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00447-7     Document Type: Article

References (14)

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