Characterization of micromachined cryogenic coolers

Journal of Micromechanics and Microengineering

Volumn 17, Issue 10, 2007, Pages 1956-1960

  Lerou, P P P M ^a   Ter Brake, H J M ^a   Burger, J F ^a   Holland, H J ^a   Rogalla, H ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; CRYOGENICS; FLOW PATTERNS; MEMS; MICROMACHINING;

COOLING POWER; CRYOGENIC COOLERS; JOULE-THOMSON EXPANSION; MICRO COOLERS;

COOLING SYSTEMS;

EID: 34748865609     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/10/005     Document Type: Article

References (13)

1. Kirschman R K 1985 Cold electronics: an overview Cryogenics 36 115-22
2. Kirschman R K 1986 Low Temperature Electronics (New York: IEEE Press)
3. Vassighi A and Sachdev M 2006 Thermal and Power Management of Integrated Circuits (New York: Springer)
4. Lerou P, Venhorst G, Berends C, Veenstra T, Blom M, Burger J, ter Brake H and Rogalla H 2006 Fabrication of a micro cryogenic cold stage using MEMS-technology J. Micromech. Microeng. 16 1919-25
5. Walker G 1983 Cryocoolers: Part 1. Fundamentals (New York: Plenum)
6. Jeong S 2004 How difficult is it to make a micro refrigerator Int. J. Refrig. 27 309-13
7. Garvey S, Logan S, Rowe R and Little W A 1983 Performance characteristics of a low-flow rate 25 mW, LN2 Joule- Thomson refrigerator fabricated by photolithographic means Appl. Phys. Lett. 42 1048-50
8. Burger J, Holland H, Seppenwoolde J, Berenschot E, ter Brake H, Gardeniers J, Elwenspoek M and Rogalla H 2001 165 K microcooler operating with a sorption compressor and a micromachined cold stage Cryocoolers vol 11 (New York: Kluwer Academic/Plenum) pp 551-60
9. Lerou P, Veenstra T, Burger J, ter Brake H and Rogalla H 2005 Optimization of counterflow heat exchanger geometry through minimization of entropy generation Cryogenics 45 659-69
10. Saes Getters, Viale Italia 77, 20020 Lainate (Milan, Italy) http://www.saesgetters.com/
11. Lerou P, ter Brake H, Holland H, Burger J and Rogalla H 2007 Insight into clogging of micromachined cryogenic coolers Appl. Phys. Lett. at press
12. Bendavida A, Martina P J and Wieczorekb L 1999 Morphology and optical properties of gold thin films prepared by filtered arc deposition Thin Solid Films 354 169-75
13. Bejan A 1993 Heat Transfer (New York: Wiley)