Rapid fabrication of tooling for microfluidic devices via laser micromachining and hot embossing

Journal of Micromechanics and Microengineering

Volumn 18, Issue 2, 2008, Pages

  Shiu, P P ^a,b   Knopf, G K ^b   Ostojic, M ^a   Nikumb, S ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b UNIVERSITY OF WESTERN ONTARIO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

LASER APPLICATIONS; LITHOGRAPHY; MICROCHANNELS; MICROMACHINING; POLYMETHYL METHACRYLATES; SHEET METAL;

HOT EMBOSSING; LASER MICROMACHINING; MICROFLUIDIC DEVICES; POLYMER MICROFLUIDIC DEVICES;

MICROFLUIDICS;

EID: 42549145800     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/2/025012     Document Type: Article

References (19)

1. Becker H and Heim U 2000 Hot embossing as a method for the fabrication of polymer high aspect ratio structures Sensors Actuators A 83 130-5
2. Heckele M, Bacher W and Muller K D 1998 Hot embossing-the molding technique for plastic microstructures Microsyst. Technol. 4 122-4
3. Piotter V, Hanemann T, Ruprecht R and Hauelt J 1997 Injection molding and related techniques for fabrication of microstructures Microsyst. Technol. 4 129-33
4. Larsson O, Ohman O, Billman A, Lundbladh L, Lindell C and Palmskog G 1997 Silicon based replication technology of 3D-microstructures by conventional CD-injection molding techniques Proc. Transducers'97 9th Int. Conf. on Solid-state Sensors and Actuators (Chicago, IL, USA, 16-19 June) pp 1415-8
5. Becker B W, Ehrfeld W, Hagmann P, Maner A and Munchmeyer D 1986 Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvano-forming and plastic molding Microelectron. Eng. 4 35-6
6. Abgrall P and Gue A-M 2007 Lab-on-chip technologies: making a microfluidic network and coupling it into a complete microsystem-a review J. Micromech. Microeng. 17 R15-R49
7. Duffy D C, McDonald J C, Schueller O J A and Whitesides G M 1998 Rapid prototyping of microfluidic systems in poly(dimethylsiloxane) Anal. Chem 70 4974-84
8. McDonald J C, Duffy D C, Anderson J R, Chiu D T, Wu H, Schueller O J A and Whitesides GM 2000 Fabrication of microfluidic systems in poly(di-methylsiloxane)-review Electrophoresis 21 27-40
9. Whitesides G M, Ostuni E, Takayama S, Jiang X and Ingber D E 2001 Soft lithography in biology and biochemistry Ann. Rev. Biomed. Eng. 3 335-73
10. Becker H and Locascio L 2002 Polymer microfluidic devices-review Talanta 56 267-87
11. Nguyen N T and Wereley S T 2002 Fundamentals and applications of microfluidics Fabrication Techniques for Microfluidics (Boston, MA: Artech House) p 99 chapter 3
12. McDonald J C and Whitesides G M 2002 Poly(dimethylsiloxane) as a material for fabricating microfluidic devices Acc. Chem. Res. 35 491-9
13. Shiu P P, Knopf G K, Ostojic M and Nikumb S 2007 Rapid fabrication of micromolds for polymeric microfluidic devices IEEE 20th Canadian Conf. Elec. Comp. Eng. (CCECE) (Vancouver, Canada, 07 April) pp 8-11
14. Pan LW, Shen X and Lin L 2004 Microplastic lens array fabricated by a hot intrusion process J. Microelectromech. Syst. 13 1063-71
15. Chang C Y, Yang S Y and Chu M H 2007 Rapid fabrication of ultraviolet-cured polymer microlens arrays by soft roller stamping process Microelectron. Eng. 84 355-61
16. Lee K, Kim C, Shin K S, Lee J W, Ju B K, Kim T S, Lee S K and Kang J Y 2007 Fabrication of round channels using the surface tension of PDMS and its application to a 3D serpentine mixer J. Micromech. Microeng. 17 1533-41
17. Chen C, Hirdes D and Folch A 2003 Gray-scale photolithography using microfluidic photomasks Proc. Natl Acad. Sci. 100 1499-504
18. Chen L and Ren J 2004 High-throughput DNA analysis by microchip electrophoresis Combinatorial Chem. High Throughput Screening 7 29-43
19. Korvink J G and Paul O 2006 MEMS-A Practical Guide to Design, Analysis and Applications (Berlin: Springer) pp 716-7