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Volumn 78-79, Issue 1-4, 2005, Pages 695-700
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Production of structures for microfluidics using polymer imprint techniques
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Author keywords
Hot embossing; Micromechanisation; Micromoldin; Nanoimprint lithography; Polymers
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Indexed keywords
COSTS;
FLUIDICS;
GLASS;
MICROMACHINING;
POLYMERS;
QUARTZ;
TECHNOLOGY;
HOT EMBOSSING;
MICROMECHANIZATION;
MICROMOLDIN;
NANOIMPRINT LITHOGRAPHY;
LITHOGRAPHY;
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EID: 14944363266
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mee.2004.12.087 Document Type: Conference Paper |
Times cited : (60)
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References (17)
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