SiC Films and Coatings: Amorphous, Polycrystalline, and Single Crystal Forms

Silicon Carbide Biotechnology

Volumn , Issue , 2012, Pages 17-61

  Locke, C W ^a   Severino, A ^b   La Via, F ^b   Reyes, M ^a   Register, J ^a   Saddow, S E ^a,c  

^a University of South Florida   (United States)

^b CNR IMM   (Italy)

^c UNIVERSITY OF SOUTH FLORIDA   (United States)

Author keywords

Amorphous; CVD; Epitaxy; HCl; Polycrystalline; Porous silicon; Silicon carbide; SOI; Sputtering

Indexed keywords

EID: 84882856656     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1016/B978-0-12-385906-8.00002-7     Document Type: Chapter

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