Silicon carbide as a material for biomedical microsystems

DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

Volumn , Issue , 2009, Pages 107-114

  Zorman, Christian A ^a  

^a Case Western Reserve University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL IMAGING; BIOMEDICAL MICROSYSTEMS; BIOSENSING; MICRO DEVICES; SI MICROMACHINING;

CHEMICAL PROPERTIES; ELECTRIC PROPERTIES; MECHANICAL PROPERTIES; MICROSYSTEMS;

SILICON CARBIDE;

EID: 70349201093     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (34)

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