Role of SIMOX defects on the structural properties of β-SiC/SIMOX

Materials Science and Engineering B

Volumn 61-62, Issue , 1999, Pages 586-592

  Ferro, G ^a   Planes, N ^b   Papaioannou, V ^c   Chaussende, D ^a   Monteil, Y ^a   Stoemenos, Y ^c   Camassel, J ^b  

^a UNIVERSITÉ LYON 1   (France)

^b CNRS   (France)

^c ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

Cavities; Cavity formation; Hetero epitaxy; Silicon overlayer; SIMOX; SiC

Indexed keywords

SEPARATION BY IMPLANTATION OF OXYGEN (SIMOX);

CRYSTAL DEFECTS; DIFFUSION IN SOLIDS; EPITAXIAL GROWTH; FILM GROWTH; SEMICONDUCTING FILMS; SEMICONDUCTOR GROWTH; SILICON CARBIDE; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; THIN FILMS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0032644601     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(98)00480-2     Document Type: Article

References (19)

1. Capano M.A., Trew R.J. MRS Bull. 22:1997;19.
2. Pazik J.C., Kelner G., Bottka N., Freitas J.A. Jr. Mater. Sci. Eng. B11:1992;125.
3. Steckl A.J., Yuan C., Tong Q.-Y., Gosele U., Loboda M.J. J. Electrochem. Soc. 141:1994;66.
4. Dezauzier C., Bluet J.M., Contreras S. et al. Gil B., Aulombard R.L. Semiconductor Heteroepitaxy: Growth, Characterization and Device Applications. 1995;310 World Scientific, Singapore.
5. Camassel J. J. Vac. Sci. Technol. B16:1998;1648.
6. Dezauzier C., Bluet J.M., Contreras S. et al. Inst. Phys. Conf. Ser. 142:1995;453.
7. Bluet J.M., Falkovsky L.A., Planes N., Camassel J. Mater. Sci. Forum. 264-268:1998;395.
8. Reichert W., Lossy R., Gonzalez Sirgo J.M., Obermeier E., Stoemenos J. Inst. Phys. Conf. Ser. 142:1995;129.
9. Bluet J.M., Contreras-Azema S., Camassel J. et al. Mater. Sci. Eng. B46:1997;152.
10. Reichert W., Obermeier E., Stoemenos J. Diam. Relat. Mater. 6:1997;1448.
11. Nishino S., Powell J.A., Will H.A. Appl. Phys. Lett. 42:1983;460.
12. Namavar F., Colter P., Cremins-Costa A. et al. Mater. Res. Soc. Symp. Proc. 423:1996;409.
13. Papaioannou V., Pavlidou E., Stoemenos J., Reichert W., Obermeier E. Mater. Sci. Forum. 264-268:1998;445.
14. D.K. Sakana, J. Lasky, H.J. Hovel, K. Petrillo, P. Roitman, Proc. 1994 IEEE International SOI Conference, October 1994, p.111.
15. Ferro G., Monteil Y., Vincent H. et al. Thin Solid Films. 278:1996;22.
16. Frey L., Stoemenos J., Schork R., Nejim A., Hemment P.L.F. J. Electrochem. Soc. 144:1997;4314.
17. Ferro G., Monteil Y., Vincent H. et al. J. Appl. Physics. 80:1996;4691.
18. Diani M., Mesli A., Kubler L. et al. Mater. Sci. Eng. B29:1995;110.
19. Li J.P., Steckl A.J., Golekci I. et al. Appl. Phys. Lett. 62:1993;3135.