SCOPUS 정보 검색 플랫폼

Materials Science Forum

Volumn 433-436, Issue , 2003, Pages 161-164

Fast Epitaxial Growth of High-Quality 4H-SiC by Vertical Hot-Wall CVD

(3) Fujihira, K a,b Kimoto, T a Matsunami, H a

a KYOTO UNIVERSITY (Japan)

b MITSUBISHI ELECTRIC CORPORATION (Japan)

Author keywords

Deep Level Transient Spectroscopy; Fast Epitaxy; Morphology; Photoluminescence

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DEEP LEVEL TRANSIENT SPECTROSCOPY; EPITAXIAL GROWTH; ETCHING; MORPHOLOGY; PHOTOLUMINESCENCE;

HOT-WALL REACTORS;

SILICON CARBIDE;

EID: 0242581491 PISSN: 02555476 EISSN: 16629752 Source Type: Book Series
DOI: 10.4028/www.scientific.net/msf.433-436.161 Document Type: Conference Paper

Times cited : (10)

References (10)

1
- 0345734632
- Kloster Banz
- R. Ploss, R. Rupp and I. Zverev: Ext. Abstr. 3rd Europ. Conf. on Silicon Carbide and Related Materials 2000 (Kloster Banz, 2000), p. 5
- (2000) Ext. Abstr. 3rd Europ. Conf. on Silicon Carbide and Related Materials 2000 , pp. 5
- Ploss, R.¹ Rupp, R.² Zverev, I.³

2
- 0031673027
- O. Kordina, K. Irvine, J. Sumakeris, H.S. Kong, M.J. Paisley and C.H. Carter Jr.: Mater. Sci. Forum, Vol. 264-268 (1998), p. 107
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 107
- Kordina, O.¹ Irvine, K.² Sumakeris, J.³ Kong, H.S.⁴ Paisley, M.J.⁵ Carter C.H., Jr.⁶

3
- 0036499704
- A. Ellison, J. Zhang, A. Henry and E. Janzen: J. Crystal Growth, Vol. 236 (2002), p. 225
- (2002) J. Crystal Growth , vol.236 , pp. 225
- Ellison, A.¹ Zhang, J.² Henry, A.³ Janzen, E.⁴

4
- 0032644609
- A. Ellison J. Zhang, J. Peterson, A. Henry, Q. Wahab, J.P. Bergman, Y.N. Makarov, A. Vorob'ev, A. Vehanen and E. Janzen: Mater. Sci. Eng., Vol. B61-62 (1999), p. 113.
- (1999) Mater. Sci. Eng. , vol.B61-62 , pp. 113
- Ellison, A.¹ Zhang, J.² Peterson, J.³ Henry, A.⁴ Wahab, Q.⁵ Bergman, J.P.⁶ Makarov, Y.N.⁷ Vorob'ev, A.⁸ Vehanen, A.⁹ Janzen, E.¹⁰

5
- 0000635629
- H. Tsuchida, I. Kamata, T. Jikimoto and K. Izumi: Mater. Sci. Forum, Vol. 338-342 (2000), p. 145
- (2000) Mater. Sci. Forum , vol.338-342 , pp. 145
- Tsuchida, H.¹ Kamata, I.² Jikimoto, T.³ Izumi, K.⁴

6
- 0036609630
- J. Zhang, A. Ellison, O. Danielsson, M.K. Linnarsson, A. Henry and E. Janzen: J. Crystal Growth, Vol. 241 (2002), p. 421
- (2002) J. Crystal Growth , vol.241 , pp. 421
- Zhang, J.¹ Ellison, A.² Danielsson, O.³ Linnarsson, M.K.⁴ Henry, A.⁵ Janzen, E.⁶

7
- 79955988123
- K. Fujihira, T. Kimoto and H. Matsunami: Appl. Phys. Lett., Vol. 80 (2002), p. 1586
- (2002) Appl. Phys. Lett. , vol.80 , pp. 1586
- Fujihira, K.¹ Kimoto, T.² Matsunami, H.³

8
- 0012586621
- K. Fujihira, T. Kimoto and H. Matsunami: Mater. Sci. Furum, Vol. 389-393 (2002), p. 175
- (2002) Mater. Sci. Furum , vol.389-393 , pp. 175
- Fujihira, K.¹ Kimoto, T.² Matsunami, H.³

9
- 0031145826
- C. Hemmingsson, N.T. Son, O. Kordina, J.P. Bergman, E. Janzen, J.L. Lindstrom, S. Savage and N. Nordell: J. Appl. Phys., Vol. 81 (1997), p. 6155
- (1997) J. Appl. Phys. , vol.81 , pp. 6155
- Hemmingsson, C.¹ Son, N.T.² Kordina, O.³ Bergman, J.P.⁴ Janzen, E.⁵ Lindstrom, J.L.⁶ Savage, S.⁷ Nordell, N.⁸

10
- 0033350955
- D. Aberg, A. Hallen and B.C. Svensson: Physica. B, Vol. 273-274 (1999), p. 672
- (1999) Physica. B , vol.273-274 , pp. 672
- Aberg, D.¹ Hallen, A.² Svensson, B.C.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.