SCOPUS 정보 검색 플랫폼

Volumn 338, Issue , 2000, Pages

Preliminary investigation of SiC on silicon for biomedical applications

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL ENGINEERING; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS;

SILICON HEART PROBE;

SILICON CARBIDE;

EID: 17044443409 PISSN: 02555476 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Article

Times cited : (9)

References (12)

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