Review of modeling electrostatically actuated microelectromechanical systems

Smart Materials and Structures

Volumn 16, Issue 6, 2007, Pages

  Batra, R C ^a   Porfiri, M ^b   Spinello, D ^a  

^a VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

^b POLYTECHNIC UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETISM; ELECTROSTATICS; FLUID MECHANICS; NUMERICAL ANALYSIS; THREE DIMENSIONAL;

MECHANICAL MODEL; MULTIPHYSICS; THERMOMECHANICS;

MEMS;

EID: 36448991927     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/16/6/R01     Document Type: Article

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