Characterization of the mechanical behavior of an electrically actuated microbeam

Journal of Micromechanics and Microengineering

Volumn 12, Issue 6, 2002, Pages 759-766

  Abdel Rahman, Eihab M ^a   Younis, Mohamed I ^a   Nayfeh, Ali H ^a  

^a VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY VALUE PROBLEMS; CAPACITANCE; CAPACITORS; EIGENVALUES AND EIGENFUNCTIONS; ELECTRIC POTENTIAL; ELECTROSTATICS; MATHEMATICAL MODELS; MICROSENSORS; NATURAL FREQUENCIES; POLARIZATION;

DIRECT CURRENT POLARIZATION VOLTAGE; ELECTRICALLY ACTUATED MICROBEAM;

MICROACTUATORS;

EID: 0036851112     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/6/306     Document Type: Article

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