Nonlocal problems in MEMS device control

Journal of Engineering Mathematics

Volumn 41, Issue 4, 2001, Pages 345-366

  Pelesko, J A ^a   Triolo, A A ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b NOKIA RESEARCH CENTER   (United States)

Author keywords

MEMS; Microelectromechanical systems; Nonlocal elliptic problem

Indexed keywords

BIFURCATION (MATHEMATICS); CAPACITANCE; ELECTRIC POTENTIAL; ELECTROSTATIC ACTUATORS; MATHEMATICAL MODELS;

CAPACITIVE CONTROL SCHEMES;

MICROELECTROMECHANICAL DEVICES;

CONTROL SYSTEM; MICROELECTROMECHANICAL SYSTEM;

EID: 0035575619     PISSN: 00220833     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1012292311304     Document Type: Article

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