Improved analysis of microbeams under mechanical and electrostatic loads

Journal of Micromechanics and Microengineering

Volumn 7, Issue 1, 1997, Pages 24-29

  Choi, Bumkyoo ^a   Lovell, E G ^b  

^a SAMSUNG Electronics   (South Korea)

^b University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTROSTATICS; LOADS (FORCES); NUMERICAL METHODS; RESIDUAL STRESSES; STRAIN; STRESS ANALYSIS; STRESS CONCENTRATION;

ELECTROSTATIC LOADS; MECHANICAL LOADS; MICROBEAMS; SHOOTING METHOD BASED COMPUTER CODE; STRETCHING EFFECTS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031102158     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/1/005     Document Type: Article

References (3)

1. Choi B 1992 Diaphragm stretching and contact problems for microelectromechanical pressure transducers PhD Thesis University of Wisconsin, Madison pp 53-95
2. Gere J M and Timoshenko S P 1990 Mechanics of Materials 3rd edn (Boston: PWS-Kent) pp 535-40
3. Carnahan B, Luther H A and Wilkes J O 1969 Applied Numerical Methods (New York: Wiley) pp 405-14