Large deflections of microbeams under electrostatic loads

Journal of Micromechanics and Microengineering

Volumn 14, Issue 3, 2004, Pages 365-373

  Collenz, A ^a,b   De Bona, F ^a   Gugliotta, A ^b   Soma A ^b  

^a UNIVERSITY OF UDINE   (Italy)

^b POLITECNICO DI TORINO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL COUPLING; MICROBEAMS;

ALGORITHMS; COMPUTATIONAL COMPLEXITY; ELECTRIC FIELD EFFECTS; ELECTRIC LOADS; ELECTRIC POTENTIAL; ELECTROSTATICS; FINITE ELEMENT METHOD; MICROACTUATORS; NUMERICAL METHODS; PROBLEM SOLVING;

MICROELECTROMECHANICAL DEVICES;

EID: 1642603469     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/3/008     Document Type: Article

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