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Volumn 39, Issue 24, 1996, Pages 4119-4139

Dynamic analysis of micro-electro-mechanical systems

Author keywords

Boundary element method; Dynamic analysis; Finite elements; Micro electro mechanical systems; Numerical simulation

Indexed keywords

BOUNDARY ELEMENT METHOD; COMPUTER SIMULATION; FINITE ELEMENT METHOD; INTEGRATION; MICROELECTROMECHANICAL DEVICES;

EID: 0030378543     PISSN: 00295981     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1097-0207(19961230)39:24<4119::AID-NME42>3.0.CO;2-4     Document Type: Article
Times cited : (76)

References (9)
  • 2
    • 0027611922 scopus 로고
    • Capacitive sensors: When and how to use them
    • R. Puers, 'Capacitive sensors: when and how to use them', Sensors Actuators, 73-38, 93-105 (1993).
    • (1993) Sensors Actuators , vol.73 , Issue.38 , pp. 93-105
    • Puers, R.1
  • 4
    • 0026837056 scopus 로고
    • Fabrication of high frequency two-dimensional nanoactuators for scanned probe devices
    • J. Yao, S. Arney and N. C. MacDonald, 'Fabrication of high frequency two-dimensional nanoactuators for scanned probe devices', J. Microelectromechanical Systems, 1(1), 14-22 (1992).
    • (1992) J. Microelectromechanical Systems , vol.1 , Issue.1 , pp. 14-22
    • Yao, J.1    Arney, S.2    MacDonald, N.C.3
  • 5
    • 0027283106 scopus 로고
    • SCREAM I: A single mask, single-crystal silicon process for microelectromechanical structures
    • Fort Lauderdale, FL, 7-10 February
    • K. A. Shaw, Z. L. Zhang and N. C. MacDonald, 'SCREAM I: A single mask, single-crystal silicon process for microelectromechanical structures', Proc. 6th IEEE Workshop on Micro Electro Mechanical Systems, Fort Lauderdale, FL, 7-10 February, pp. 155-160, 1992.
    • (1992) Proc. 6th IEEE Workshop on Micro Electro Mechanical Systems , pp. 155-160
    • Shaw, K.A.1    Zhang, Z.L.2    MacDonald, N.C.3
  • 8
    • 5744232619 scopus 로고
    • Personal Communication
    • N. C. MacDonald, Personal Communication (1995).
    • (1995)
    • MacDonald, N.C.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.