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Volumn 39, Issue 24, 1996, Pages 4119-4139
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Dynamic analysis of micro-electro-mechanical systems
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Author keywords
Boundary element method; Dynamic analysis; Finite elements; Micro electro mechanical systems; Numerical simulation
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Indexed keywords
BOUNDARY ELEMENT METHOD;
COMPUTER SIMULATION;
FINITE ELEMENT METHOD;
INTEGRATION;
MICROELECTROMECHANICAL DEVICES;
DYNAMIC ANALYSIS;
DYNAMICS;
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EID: 0030378543
PISSN: 00295981
EISSN: None
Source Type: Journal
DOI: 10.1002/(SICI)1097-0207(19961230)39:24<4119::AID-NME42>3.0.CO;2-4 Document Type: Article |
Times cited : (76)
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References (9)
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