Cantilever beam electrostatic MEMS actuators beyond pull-in

Journal of Micromechanics and Microengineering

Volumn 16, Issue 9, 2006, Pages 1800-1810

  Gorthi, Subrahmanyam ^a   Mohanty, Atanu ^a   Chatterjee, Anindya ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; COMPUTER SIMULATION; DIELECTRIC PROPERTIES; ELECTROSTATICS; MICROACTUATORS;

3D SIMULATIONS; BEAM MODEL; DIELECTRIC LAYERS; DYNAMIC STABILITY ANALYSES;

MICROELECTROMECHANICAL DEVICES;

EID: 33747224774     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/9/007     Document Type: Article

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