Pull-in time dynamics as a measure of absolute pressure

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 290-294

  Gupta, Raj K ^a   Senturia, Stephen D ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DAMPING; ELECTROSTATICS; IN SITU PROCESSING; MICROMACHINING; PRESSURE MEASUREMENT; SEMICONDUCTOR DEVICE MANUFACTURE; SENSORS; SILICON WAFERS;

ELECTROSTATICALLY ACTUATED MICROMECHANICAL FIXED-FIXED BEAM; PULL IN TIME SIMULATIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030717786     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (24)