A new approach to the modeling and simulation of flexible microstructures under the effect of squeeze-film damping

Journal of Micromechanics and Microengineering

Volumn 14, Issue 2, 2004, Pages 170-181

  Nayfeh, Ali H ^a   Younis, Mohammad I ^a  

^a VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GAS PRESSURES; REYNOLDS EQUATION; SQUEEZE FILM DAMPING;

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; DAMPING; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROSTRUCTURE; PERTURBATION TECHNIQUES; PRESSURE DISTRIBUTION;

MICROELECTROMECHANICAL DEVICES;

EID: 1342305029     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/2/002     Document Type: Article

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