Speed-energy optimization of electrostatic actuators based on pull-in

Journal of Microelectromechanical Systems

Volumn 8, Issue 3, 1999, Pages 290-298

  Castañer, Luis M ^a,b   Senturia, Stephen D ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTROSTATIC DEVICES; ENERGY MANAGEMENT; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; TRANSIENTS;

SWITCHING TRANSIENTS;

MICROACTUATORS;

EID: 0032594981     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.788633     Document Type: Article

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