An improved Reynolds-equation model for gas damping of microbeam motion

Journal of Microelectromechanical Systems

Volumn 13, Issue 4, 2004, Pages 653-659

  Gallis, Michael A ^a   Torczynski, John R ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; CANTILEVER BEAMS; COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; DAMPING; GAS DYNAMICS; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; MONTE CARLO METHODS; NAVIER STOKES EQUATIONS; REYNOLDS NUMBER;

DIRECT SIMULATION MONTE CARLO; GAS DAMPING; MICROBEAM MOTION; NAVIER-STOKES SLIP-JUMP SIMULATIONS; REYNOLDS EQUATION;

MICROELECTROMECHANICAL DEVICES;

EID: 4344578277     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.832194     Document Type: Article

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