Dynamics of polysilicon parallel-plate electrostatic actuators

Sensors and Actuators, A: Physical

Volumn 52, Issue 1-3, 1996, Pages 216-220

  Chu, Patrick B ^a   Nelson, Phyllis R ^a   Tachiki, Mark L ^a   Pister, Kristofer S J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Nonlinear dynamics; Optical measurement; Parallel plate electrostatic actuator; Polysilicon microgripper; Squeeze film damping; Surface micromachining

Indexed keywords

ELECTROSTATIC DEVICES; INTERFEROMETERS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL VARIABLES MEASUREMENT;

ELECTROSTATIC ACTUATORS; POLYSILICON MICROGRIPPER; SQUEEZE FILM DAMPING; SURFACE MICROMACHINING;

ACTUATORS;

EID: 0030103275     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)80152-X     Document Type: Article

References (3)

1. K.S.J. Pister, M.W. Judy, S. Burgett and R. Fearing, Microfabricated hinges, Sensors and Actuators A, 33 (1992) 249-256.
2. J.B. Starr, Squeeze-film damping in solid-state accelerometers, Proc. IEEE Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 4-7 June, 1990, pp. 44-47.
3. P.B. Chu and S.J. Pister, Analysis of closed-loop control of parallel-plate electrostatic microgrippers, Proc. IEEE Int. Conf. Robotics and Automation, San Diego, CA, USA, 8-13 May, 1994, pp. 820-850.