The effect of the small-aspect-ratio approximation on canonical electrostatic MEMS models

Journal of Engineering Mathematics

Volumn 53, Issue 3-4, 2005, Pages 239-252

  Pelesko, John A ^a   Driscoll, Tobin A ^a  

^a UNIVERSITY OF DELAWARE   (United States)

Author keywords

Continuation method; MEMS; Microelectromechanical systems; Nanoelectromechanical systems; NEMS; Nonlinear elliptic problem

Indexed keywords

APPROXIMATION THEORY; ASPECT RATIO; ELECTRIC FIELD EFFECTS; ELECTROSTATIC DEVICES; LAPLACE TRANSFORMS; MATHEMATICAL MODELS; MICROACTUATORS; NANOTECHNOLOGY;

CANONICAL ELECTROSTATIC; CONTINUATION METHOD; LAPLACE EQUATION;

MICROELECTROMECHANICAL DEVICES;

APPROXIMATION THEORY; ASPECT RATIO; ELECTRIC FIELD EFFECTS; ELECTROSTATIC DEVICES; LAPLACE TRANSFORMS; MATHEMATICAL MODELS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY;

EID: 33644802602     PISSN: 00220833     EISSN: 15732703     Source Type: Journal    
DOI: 10.1007/s10665-005-9013-2     Document Type: Review

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