Influence of van der Waals force on the pull-in parameters of cantilever type nanoscale electrostatic actuators

Microsystem Technologies

Volumn 12, Issue 12, 2006, Pages 1153-1161

  Ramezani, Asghar ^a   Alasty, Aria ^a   Akbari, Javad ^a  

^a SHARIF UNIVERSITY OF TECHNOLOGY   (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CANTILEVER BEAMS; ELECTRIC FIELDS; GREEN'S FUNCTION; INTEGRAL EQUATIONS; MICROELECTROMECHANICAL DEVICES;

CANTILEVER TYPE SWITCHES; DISTRIBUTED PARAMETER MODEL; NANOMECHANICAL SWITCHES;

VAN DER WAALS FORCES;

EID: 33748776024     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0244-6     Document Type: Article

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